Studies on the structure and bonding state of nitric amorphous carbon (a-CNx) films by reactive rf magnetron sputtering

2000 ◽  
Vol 377-378 ◽  
pp. 320-325 ◽  
Author(s):  
Hae-Suk Jung ◽  
Hyung-Ho Park
Keyword(s):  
Magnetron Sputtering ◽  
Amorphous Carbon ◽  
Rf Magnetron Sputtering ◽  
Bonding State ◽  
Structure And Bonding ◽  
Cnx Films ◽  
Reactive Rf Magnetron Sputtering

Structural Properties of Amorphous Carbon Nitride Films Prepared by Reactive RF-Magnetron Sputtering

1993 ◽  
Vol 32 (Part 2, No. 10A) ◽  
pp. L1465-L1468 ◽  
Author(s):  
Noriaki Nakayama ◽  
Yasuaki Tsuchiya ◽  
Satoru Tamada ◽  
Kouji Kosuge ◽  
Shinji Nagata ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Structural Properties ◽  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Rf Magnetron Sputtering ◽  
Amorphous Carbon Nitride ◽  
Reactive Rf Magnetron Sputtering

Microstructure related photoluminescence in a-CNx films deposited by reactive rf magnetron sputtering

2004 ◽  
Vol 129 (2) ◽  
pp. 107-112 ◽  
Author(s):  
M. Lejeune ◽  
O. Durand-Drouhin ◽  
C. Barthou ◽  
Ph. Lavallard ◽  
H.-J. von Bardeleben ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Cnx Films ◽  
Reactive Rf Magnetron Sputtering

Stress in NbCxN1-xFilms Prepared by Reactive Rf Magnetron Sputtering

1993 ◽  
Vol 32 (Part 2, No. 6B) ◽  
pp. L834-L836 ◽  
Author(s):  
Shogo Kiryu ◽  
Akira Shoji ◽  
Satoshi Kohjiro ◽  
Shinji Kodaira
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Reactive Rf Magnetron Sputtering
Sign in / Sign up

Export Citation Format

Share Document