A possible method for large area deposition of a-Si:H thin films using electron cyclotron resonance plasma-enhanced chemical vapor deposition
2000 ◽
Vol 379
(1-2)
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pp. 259-264
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2016 ◽
Vol 49
(28)
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pp. 285203
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1995 ◽
Vol 24
(10)
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pp. 1435-1441
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1999 ◽
Vol 17
(2)
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pp. 433-444
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2004 ◽
Vol 22
(3)
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pp. 883
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2005 ◽
Vol 23
(1)
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pp. 168
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