Preparation of metal nitride and oxide thin films using shielded reactive vacuum arc deposition
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2000 ◽
Vol 133-134
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pp. 283-288
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1996 ◽
Vol 82
(3)
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pp. 247-253
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1995 ◽
Vol 76-77
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pp. 181-189
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2008 ◽
Vol 79
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pp. 065104
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2004 ◽
Vol 106
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pp. 300-304
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2006 ◽
Vol 18
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pp. 6391-6400
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2010 ◽
Vol 160-162
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pp. 194-199
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