Macroparticle‐free thin films produced by an efficient vacuum arc deposition technique

1993 ◽  
Vol 74 (6) ◽  
pp. 4239-4241 ◽  
Author(s):  
Simone Anders ◽  
André Anders ◽  
Ian Brown
Keyword(s):  
Thin Films ◽  
Vacuum Arc ◽  
Deposition Technique ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

Vacuum arc deposition of thin films from an LaB6 cathode

1996 ◽  
Vol 82 (3) ◽  
pp. 247-253 ◽  
Author(s):  
S. Schmidbauer ◽  
H. Klose ◽  
A. Ehrlich ◽  
M. Friedrich ◽  
M. Röder ◽  
...  
Keyword(s):  
Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

Hemocompatibility of ZnO thin films prepared by filtered cathodic vacuum arc deposition

Vacuum ◽  
2013 ◽  
Vol 89 ◽  
pp. 220-224 ◽  
Author(s):  
Zhanyun Huang ◽  
Ping Luo ◽  
Wanzong Chen ◽  
Shirong Pan ◽  
Dihu Chen
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Arc Deposition

Arc behaviour during filtered vacuum arc deposition of Sn-O thin films

1995 ◽  
Vol 76-77 ◽  
pp. 181-189 ◽  
Author(s):  
L. Kaplan ◽  
V.N. Zhitomirsky ◽  
S. Goldsmith ◽  
R.L. Boxman ◽  
I. Rusman
Keyword(s):  
Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

Fabrication for multilayered composite thin films by dual-channel vacuum arc deposition

2008 ◽  
Vol 79 (6) ◽  
pp. 065104 ◽  
Author(s):  
Hua Dai ◽  
Yao Shen ◽  
Jing Wang ◽  
Ming Xu ◽  
Liuhe Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Vacuum Arc ◽  
Composite Thin Films ◽  
Multilayered Composite ◽  
Dual Channel ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

Preparation of metal nitride and oxide thin films using shielded reactive vacuum arc deposition

Vacuum ◽  
2000 ◽  
Vol 59 (1) ◽  
pp. 159-167 ◽  
Author(s):  
R. Miyano ◽  
K. Kimura ◽  
K. Izumi ◽  
H. Takikawa ◽  
T. Sakakibara
Keyword(s):  
Thin Films ◽  
Vacuum Arc ◽  
Oxide Thin Films ◽  
Metal Nitride ◽  
Vacuum Arc Deposition ◽  
Arc Deposition
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