A surface cleaning method for sputter deposition of pure titanium film onto TiNi shape memory alloy substrate

Vacuum ◽  
2001 ◽  
Vol 60 (1-2) ◽  
pp. 197-199 ◽  
Author(s):  
T Sonoda ◽  
A Watazu ◽  
J Zhu ◽  
A Kamiya ◽  
K Ushiki ◽  
...  
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Pure Titanium ◽  
Surface Cleaning ◽  
Sputter Deposition ◽  
Titanium Film ◽  
Cleaning Method ◽  
Alloy Substrate

Micro-channel fabrication on NiTi shape memory alloy substrate using Nd3+: YAG laser

2020 ◽  
Vol 35 (3) ◽  
pp. 270-278 ◽  
Author(s):  
Ashish K Shukla ◽  
Jayachandran S ◽  
Jitesh V Bhoyar ◽  
Akash K ◽  
Mani Prabu SS ◽  
...  
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Niti Shape Memory Alloy ◽  
Micro Channel ◽  
Yag Laser ◽  
Alloy Substrate

Coating of Ti–6Al–4V alloy with pure titanium film by sputter-deposition for improving biocompatibility

2006 ◽  
Vol 38 (4) ◽  
pp. 797-800 ◽  
Author(s):  
T. Sonoda ◽  
T. Saito ◽  
A. Watazu ◽  
K. Katou ◽  
T. Asahina
Keyword(s):  
Pure Titanium ◽  
Sputter Deposition ◽  
Titanium Film

Fabrication of Silicon-Based Shape Memory Alloy Micro-Actuators

1992 ◽  
Vol 276 ◽  
Author(s):  
A. David Johnson ◽  
J. D. Busch ◽  
Curtis A. Ray ◽  
Charles Sloan
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Nickel Titanium ◽  
Titanium Film ◽  
Micro Electro Mechanical Systems ◽  
Actuation Mechanism ◽  
Micro Actuators ◽  
Chemical Milling ◽  
Silicon Based

ABSTRACTThin film shape memory alloy has been integrated with silicon in a new actuation mechanism for micro-electro-mechanical systems. This paper compares nickel-titanium film with other actuators, describes recent results of chemical milling processes developed to fabricate shape memory alloy micro-actuators in silicon, and describes simple actuation mechanisms which have been fabricated and tested.

Sputter-Deposited Shape-Memory Alloy Thin Films: Properties and Applications

MRS Bulletin ◽  
2002 ◽  
Vol 27 (2) ◽  
pp. 111-114 ◽  
Author(s):  
Akira Ishida ◽  
Valery Martynov
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Microelectromechanical Systems ◽  
Sputter Deposition ◽  
Bulk Materials ◽  
Shape Memory Actuators ◽  
Sputter Deposited ◽  
Memory Characteristics

AbstractShape-memory alloy (SMA) thin films formed by sputter deposition have attracted considerable attention in the last decade. Current intensive research demonstrates that unique fine microstructures are responsible for the superior shape-memory characteristics observed in thin films as compared with bulk materials. Simultaneously, much effort has been undertaken to develop and fabricate micro devices actuated by SMA thin films. This article reviews the research to date on shape-memory behavior and the mechanical properties of SMA thin films in connection with their peculiar microstructures. Promising applications such as microvalves are demonstrated, along with a focused discussion on process-related problems. All of the results indicate that thin-film shape-memory actuators are ready to contribute to the development of microelectromechanical systems.

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