Amorphous carbon film deposition using a DC-biased screen-grid in an electron cyclotron resonance plasma

Vacuum ◽

10.1016/s0042-207x(98)00192-4 ◽

1998 ◽

Vol 51 (3) ◽

pp. 445-451 ◽

Author(s):

SF Yoon ◽

Ruslie ◽

J Ahn ◽

Q Zhang ◽

YS Wu ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Electron Cyclotron ◽

Film Deposition ◽

Amorphous Carbon Film ◽

Electron Cyclotron Resonance Plasma ◽

Screen Grid ◽

Resonance Plasma

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Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.l802 ◽

1993 ◽

Vol 32 (Part 2, No. 6A) ◽

pp. L802-L805 ◽

Author(s):

Akira Ishii ◽

Yoshiyuki Sakaguchi ◽

Shoichiro Minomo ◽

Michio Taniguchi ◽

Masato Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Diamond Like Carbon Film ◽

Resonance Plasma

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Super‐wide electron cyclotron resonance plasma source excited by traveling microwave as an efficient tool for diamondlike carbon film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579302 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1241-1243

Author(s):

A. Ishii ◽

S. Amadatsu ◽

S. Minomo ◽

M. Taniguchi ◽

M. Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Efficient Tool ◽

Electron Cyclotron Resonance Plasma ◽

Diamondlike Carbon ◽

Resonance Plasma

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Electron cyclotron resonance plasma source for conductive film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579309 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1281-1286 ◽

Author(s):

Toshiro Ono ◽

Hiroshi Nishimura ◽

Masaru Shimada ◽

Seitaro Matsuo

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Electron Cyclotron Resonance Plasma ◽

Conductive Film ◽

Resonance Plasma

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Metal-containing amorphous carbon film development using electron cyclotron resonance CVD

Diamond and Related Materials ◽

10.1016/s0925-9635(00)00459-3 ◽

2001 ◽

Vol 10 (2) ◽

pp. 132-138 ◽

Author(s):

H. Rusli ◽

S.F. Yoon ◽

Q.F. Huang ◽

J. Ahn ◽

Q. Zhang ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Electron Cyclotron ◽

Amorphous Carbon Film ◽

Film Development

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Dissociative Excitation of C2H2 in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2Δ) Radicals and Formation of Hydrogenated Amorphous Carbon Films

Plasma Chemistry and Plasma Processing ◽

10.1007/s11090-012-9355-2 ◽

2012 ◽

Vol 32 (2) ◽

pp. 231-248 ◽

Author(s):

Haruhiko Ito ◽

Katsuaki Koshimura ◽

Saori Onitsuka ◽

Kohtaro Okada ◽

Tsuneo Suzuki ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Dissociative Excitation ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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Growth and bonding structure of hard hydrogenated amorphous carbon thin films deposited from an electron cyclotron resonance plasma

Journal of Applied Physics ◽

10.1063/1.1423786 ◽

2002 ◽

Vol 91 (2) ◽

pp. 867-873 ◽

Author(s):

O. Durand-Drouhin ◽

M. Lejeune ◽

M. Benlahsen

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Hydrogenated Amorphous Carbon ◽

Bonding Structure ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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Mass Spectrometry Investigation on Decamethylcyclopentasiloxane Electron Cyclotron Resonance Plasma for SiCOH Film Deposition

Chinese Physics Letters ◽

10.1088/0256-307x/25/2/076 ◽

2008 ◽

Vol 25 (2) ◽

pp. 636-639 ◽

Author(s):

Zhang Hai-Yan ◽

Ye Chao ◽

Ning Zhao-Yuan

Keyword(s):

Mass Spectrometry ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Film Deposition ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Solid Solubility of Nitrogen in Amorphous Carbon Films Deposited in Electron Cyclotron Resonance Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.4983 ◽

1998 ◽

Vol 37 (Part 1, No. 9A) ◽

pp. 4983-4988 ◽

Author(s):

Hidetoshi Saitoh ◽

Tohru Inoue ◽

Shigeo Ohshio

Keyword(s):

Amorphous Carbon ◽

Solid Solubility ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Resonance Plasma

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Oxide film deposition by radio frequency sputtering with electron cyclotron resonance plasma stimulation

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579484 ◽

1995 ◽

Vol 13 (5) ◽

pp. 2427-2434 ◽

Author(s):

Morito Matsuoka ◽

Shun‐ichi Tohno

Keyword(s):

Radio Frequency ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Film Deposition ◽

Electron Cyclotron Resonance Plasma ◽

Radio Frequency Sputtering ◽

Resonance Plasma

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Inversion from selective homoepitaxy of Si to selective Si film deposition on SiO2using an ultraclean electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.108018 ◽

1992 ◽

Vol 61 (24) ◽

pp. 2908-2910 ◽

Author(s):

Takashi Matsuura ◽

Tadahiro Ohmi ◽

Junichi Murota ◽

Shoichi Ono

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Film Deposition ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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