Metal-containing amorphous carbon film development using electron cyclotron resonance CVD

Diamond and Related Materials ◽

10.1016/s0925-9635(00)00459-3 ◽

2001 ◽

Vol 10 (2) ◽

pp. 132-138 ◽

Author(s):

H. Rusli ◽

S.F. Yoon ◽

Q.F. Huang ◽

J. Ahn ◽

Q. Zhang ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Electron Cyclotron ◽

Amorphous Carbon Film ◽

Film Development

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Amorphous carbon film deposition using a DC-biased screen-grid in an electron cyclotron resonance plasma

Vacuum ◽

10.1016/s0042-207x(98)00192-4 ◽

1998 ◽

Vol 51 (3) ◽

pp. 445-451 ◽

Author(s):

SF Yoon ◽

Ruslie ◽

J Ahn ◽

Q Zhang ◽

YS Wu ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Electron Cyclotron ◽

Film Deposition ◽

Amorphous Carbon Film ◽

Electron Cyclotron Resonance Plasma ◽

Screen Grid ◽

Resonance Plasma

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Optical gap of fluorinated amorphous carbon films prepared by electron cyclotron resonance trifluromethane and benzene plasmas

Diamond and Related Materials ◽

10.1016/j.diamond.2003.10.052 ◽

2004 ◽

Vol 13 (1) ◽

pp. 191-197 ◽

Author(s):

Chao Ye ◽

Zhaoyuan Ning ◽

Shanhua Cheng ◽

Yu Xin ◽

Shenhua Xu

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films ◽

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On the microstructural, optical and mechanical properties of hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00288-5 ◽

2000 ◽

Vol 9 (3-6) ◽

pp. 752-755 ◽

Author(s):

O. Durand-Drouhin ◽

A. Zeinert ◽

M. Benlahsen ◽

K. Zellama ◽

R. Kré ◽

...

Keyword(s):

Mechanical Properties ◽

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films ◽

Optical And Mechanical Properties ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

Thin Solid Films ◽

10.1016/s0040-6090(98)01332-7 ◽

1999 ◽

Vol 340 (1-2) ◽

pp. 62-67 ◽

Author(s):

S.F. Yoon ◽

Rusli ◽

J. Ahn ◽

Q. Zhang ◽

C.Y. Yang ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films

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Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.l802 ◽

1993 ◽

Vol 32 (Part 2, No. 6A) ◽

pp. L802-L805 ◽

Author(s):

Akira Ishii ◽

Yoshiyuki Sakaguchi ◽

Shoichiro Minomo ◽

Michio Taniguchi ◽

Masato Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Diamond Like Carbon Film ◽

Resonance Plasma

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Super‐wide electron cyclotron resonance plasma source excited by traveling microwave as an efficient tool for diamondlike carbon film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579302 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1241-1243

Author(s):

A. Ishii ◽

S. Amadatsu ◽

S. Minomo ◽

M. Taniguchi ◽

M. Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Efficient Tool ◽

Electron Cyclotron Resonance Plasma ◽

Diamondlike Carbon ◽

Resonance Plasma

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Dissociative Excitation of C2H2 in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2Δ) Radicals and Formation of Hydrogenated Amorphous Carbon Films

Plasma Chemistry and Plasma Processing ◽

10.1007/s11090-012-9355-2 ◽

2012 ◽

Vol 32 (2) ◽

pp. 231-248 ◽

Author(s):

Haruhiko Ito ◽

Katsuaki Koshimura ◽

Saori Onitsuka ◽

Kohtaro Okada ◽

Tsuneo Suzuki ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Dissociative Excitation ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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Electron field emission from amorphous carbon nitride synthesized by electron cyclotron resonance plasma

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1303813 ◽

2000 ◽

Vol 18 (4) ◽

pp. 1840 ◽

Author(s):

X. W. Liu ◽

S. H. Tsai ◽

L. H. Lee ◽

M. X. Yang ◽

A. C. M. Yang ◽

...

Keyword(s):

Field Emission ◽

Amorphous Carbon ◽

Cyclotron Resonance ◽

Carbon Nitride ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Field Emission ◽

Electron Field ◽

Amorphous Carbon Nitride ◽

Resonance Plasma

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Growth and bonding structure of hard hydrogenated amorphous carbon thin films deposited from an electron cyclotron resonance plasma

Journal of Applied Physics ◽

10.1063/1.1423786 ◽

2002 ◽

Vol 91 (2) ◽

pp. 867-873 ◽

Author(s):

O. Durand-Drouhin ◽

M. Lejeune ◽

M. Benlahsen

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Hydrogenated Amorphous Carbon ◽

Bonding Structure ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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Solid Solubility of Nitrogen in Amorphous Carbon Films Deposited in Electron Cyclotron Resonance Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.4983 ◽

1998 ◽

Vol 37 (Part 1, No. 9A) ◽

pp. 4983-4988 ◽

Author(s):

Hidetoshi Saitoh ◽

Tohru Inoue ◽

Shigeo Ohshio

Keyword(s):

Amorphous Carbon ◽

Solid Solubility ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Resonance Plasma

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