Molecular-dynamics simulation of silicon film growth from cluster beams
1998 ◽
Vol 142
(1-2)
◽
pp. 77-82
◽
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2007 ◽
Vol 253
(18)
◽
pp. 7471-7477
◽
Keyword(s):
Keyword(s):
2019 ◽
Vol 1172
◽
pp. 012076
◽
Keyword(s):
2015 ◽
Vol 2015.12
(0)
◽
pp. _ICOPE-15--_ICOPE-15-
Keyword(s):