Ion beam irradiation of relaxed amorphous silicon carbide

1999 ◽  
Vol 148 (1-4) ◽  
pp. 583-588 ◽  
Author(s):  
L Calcagno ◽  
P Musumeci ◽  
M.G Grimaldi
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Amorphous Silicon Carbide

Ion beam effects on the hydrogenated bonds of amorphous silicon carbide

2000 ◽  
Vol 166-167 ◽  
pp. 404-409 ◽  
Author(s):  
P. Musumeci ◽  
L. Calcagno ◽  
A. Makhtari ◽  
P. Baeri ◽  
G. Compagnini ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Ion Beam ◽  
Amorphous Silicon Carbide

Fabrication of nano-scale optical patterns in amorphous silicon carbide with focused ion beam writing

Vacuum ◽  
2005 ◽  
Vol 79 (1-2) ◽  
pp. 100-105 ◽  
Author(s):  
T. Tsvetkova ◽  
S. Takahashi ◽  
A. Zayats ◽  
P. Dawson ◽  
R. Turner ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Amorphous Silicon Carbide ◽  
Nano Scale

Pretilt angle control of carbon incorporated amorphous silicon oxide treated by ion beam irradiation

2007 ◽  
Vol 106 (1) ◽  
pp. 54-57 ◽  
Author(s):  
Kyung Chan Kim ◽  
Han Jin Ahn ◽  
Jong Bok Kim ◽  
Byoung Har Hwang ◽  
Jong Tae Kim ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Silicon Oxide ◽  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Amorphous Silicon Oxide ◽  
Pretilt Angle

Crystal-amorphous-silicon interface kinetics under ion beam irradiation

1990 ◽  
Vol 41-42 ◽  
pp. 619-626 ◽  
Author(s):  
F. Priolo ◽  
A. La Ferla ◽  
C. Spinella ◽  
E. Rimini ◽  
S.U. Campisano ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Interface Kinetics ◽  
Silicon Interface

Formation of hexagonal silicon carbide by high energy ion beam irradiation on Si (1 0 0) substrate

2006 ◽  
Vol 40 (1) ◽  
pp. 127-131 ◽  
Author(s):  
H Bhuyan ◽  
M Favre ◽  
E Valderrama ◽  
G Avaria ◽  
H Chuaqui ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Ion Beam ◽  
High Energy ◽  
Beam Irradiation ◽  
Ion Beam Irradiation
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