Ion beam effects on the hydrogenated bonds of amorphous silicon carbide

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(99)01176-3 ◽

2000 ◽

Vol 166-167 ◽

pp. 404-409 ◽

Author(s):

P. Musumeci ◽

L. Calcagno ◽

A. Makhtari ◽

P. Baeri ◽

G. Compagnini ◽

...

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Ion Beam ◽

Amorphous Silicon Carbide

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Low temperature ion beam sputter deposition of amorphous silicon carbide for wafer-level vacuum sealing

10.1109/memsys.2007.4432967 ◽

2007 ◽

Author(s):

Debbie G. Jones ◽

Robert G. Azevedo ◽

Matthew W. Chan ◽

Albert P. Pisano ◽

Muthu B. J. Wijesundara

Keyword(s):

Silicon Carbide ◽

Low Temperature ◽

Amorphous Silicon ◽

Ion Beam ◽

Sputter Deposition ◽

Wafer Level ◽

Amorphous Silicon Carbide ◽

Vacuum Sealing ◽

Ion Beam Sputter Deposition

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Ion beam-induced chemical vapor deposition with hexamethyldisilane for hydrogenated amorphous silicon carbide and silicon carbonitride films

Surface and Coatings Technology ◽

10.1016/s0257-8972(03)00130-0 ◽

2003 ◽

Vol 169-170 ◽

pp. 624-627 ◽

Author(s):

Takaomi Matsutani ◽

Tatsuya Asanuma ◽

Chang Liu ◽

Masato Kiuchi ◽

Takae Takeuchi

Keyword(s):

Silicon Carbide ◽

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Ion Beam ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapor ◽

Silicon Carbonitride ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous

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Fabrication of nano-scale optical patterns in amorphous silicon carbide with focused ion beam writing

Vacuum ◽

10.1016/j.vacuum.2005.02.001 ◽

2005 ◽

Vol 79 (1-2) ◽

pp. 100-105 ◽

Author(s):

T. Tsvetkova ◽

S. Takahashi ◽

A. Zayats ◽

P. Dawson ◽

R. Turner ◽

...

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Focused Ion Beam ◽

Ion Beam ◽

Amorphous Silicon Carbide ◽

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Ion beam irradiation of relaxed amorphous silicon carbide

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(98)00712-5 ◽

1999 ◽

Vol 148 (1-4) ◽

pp. 583-588 ◽

Author(s):

L Calcagno ◽

P Musumeci ◽

M.G Grimaldi

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Ion Beam ◽

Beam Irradiation ◽

Ion Beam Irradiation ◽

Amorphous Silicon Carbide

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Ion-beam processing of hydrogenated amorphous silicon carbide grown by plasma-enhanced chemical vapour deposition

Philosophical Magazine B ◽

10.1080/014186300255195 ◽

2000 ◽

Vol 80 (4) ◽

pp. 539-546

Author(s):

L. Calcagno, F. Giorgis, A. Makhtari,

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Ion Beam ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapour ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous

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Ion-beam-induced crystal grain nucleation in amorphous silicon carbide

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(99)00937-4 ◽

2000 ◽

Vol 161-163 ◽

pp. 917-921 ◽

Author(s):

A Höfgen ◽

V Heera ◽

A Mücklich ◽

F Eichhorn ◽

W Skorupa

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Ion Beam ◽

Amorphous Silicon Carbide

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Ion-beam processing of hydrogenated amorphous silicon carbide grown by plasma-enhanced chemical vapour deposition

Philosophical Magazine B ◽

10.1080/13642810008209762 ◽

2000 ◽

Vol 80 (4) ◽

pp. 539-546 ◽

Author(s):

L. Calcagno ◽

F. Giorgis ◽

A. Makhtari ◽

P. Musumeci ◽

R. Reitano

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Ion Beam ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapour ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous

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Structural relaxation of amorphous silicon carbide thin films in thermal annealing

Thin Solid Films ◽

10.1016/j.tsf.2007.06.194 ◽

2008 ◽

Vol 516 (12) ◽

pp. 3855-3861 ◽

Author(s):

Kun Xue ◽

Li-Sha Niu ◽

Hui-Ji Shi ◽

Jiwen Liu

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Thermal Annealing ◽

Structural Relaxation ◽

Amorphous Silicon Carbide

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Characterization of hydrogenated amorphous silicon carbide films

10.1117/12.57018 ◽

1992 ◽

Author(s):

S. Uthanna

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous

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Photoelectron yield spectroscopy and inverse photoemission spectroscopy evaluations of p-type amorphous silicon carbide films prepared using liquid materials

AIP Advances ◽

10.1063/1.4952592 ◽

2016 ◽

Vol 6 (5) ◽

pp. 055021 ◽

Author(s):

Tatsuya Murakami ◽

Takashi Masuda ◽

Satoshi Inoue ◽

Hiroshi Yano ◽

Noriyuki Iwamuro ◽

...

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Photoemission Spectroscopy ◽

Amorphous Silicon Carbide ◽

Inverse Photoemission ◽

P Type ◽

Inverse Photoemission Spectroscopy

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