Low temperature ion beam sputter deposition of amorphous silicon carbide for wafer-level vacuum sealing

2007 ◽  
Author(s):  
Debbie G. Jones ◽  
Robert G. Azevedo ◽  
Matthew W. Chan ◽  
Albert P. Pisano ◽  
Muthu B. J. Wijesundara
Keyword(s):  
Silicon Carbide ◽  
Low Temperature ◽  
Amorphous Silicon ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Wafer Level ◽  
Amorphous Silicon Carbide ◽  
Vacuum Sealing ◽  
Ion Beam Sputter Deposition

Ion beam effects on the hydrogenated bonds of amorphous silicon carbide

2000 ◽  
Vol 166-167 ◽  
pp. 404-409 ◽  
Author(s):  
P. Musumeci ◽  
L. Calcagno ◽  
A. Makhtari ◽  
P. Baeri ◽  
G. Compagnini ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Ion Beam ◽  
Amorphous Silicon Carbide

Evaluation of Silicon Carbide Formed with a Single Precursor of Di-Tert-Butylsilane

1992 ◽  
Vol 242 ◽  
Author(s):  
Sing-Pin Tay ◽  
J. P. Ellul ◽  
Susan B. Hewitt ◽  
N. G. Tarr ◽  
A. R. Boothroyd
Keyword(s):  
Silicon Carbide ◽  
Low Temperature ◽  
Amorphous Silicon ◽  
Heterojunction Bipolar Transistors ◽  
Bipolar Transistors ◽  
Amorphous Silicon Carbide ◽  
Single Precursor ◽  
C Doping ◽  
Low Temperature Process

ABSTRACTA low temperature process of silicon carbide deposition using the pyrolysis of di-tert-butylsilane has been explored for formation of emitter structures in silicon heterojunction bipolar transistors. Near stoichiometric amorphous silicon carbide films were achieved at 775°C. Doping and annealing of these films resulted in resistivity as low as 0.02 ohm-cm.

Fabrication of nano-scale optical patterns in amorphous silicon carbide with focused ion beam writing

Vacuum ◽  
2005 ◽  
Vol 79 (1-2) ◽  
pp. 100-105 ◽  
Author(s):  
T. Tsvetkova ◽  
S. Takahashi ◽  
A. Zayats ◽  
P. Dawson ◽  
R. Turner ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Amorphous Silicon Carbide ◽  
Nano Scale

R.F. reactive sputter deposition of hydrogenated amorphous silicon carbide films

1986 ◽  
Vol 139 (3) ◽  
pp. 275-285 ◽  
Author(s):  
B. Goranchev ◽  
K. Reichelt ◽  
J. Chevallier ◽  
P. Hornshoj ◽  
H. Dimigen ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Sputter Deposition ◽  
Amorphous Silicon Carbide ◽  
Reactive Sputter Deposition ◽  
Hydrogenated Amorphous
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