Gold clusters deposited on highly oriented pyrolytic graphite by pulse laser ablation and liquid metal ion source

1996 ◽  
Vol 217-218 ◽  
pp. 103-107 ◽  
Author(s):  
C.-W. Hu ◽  
A. Kasuya ◽  
A. Wawro ◽  
N. Horiguchi ◽  
R. Czajka ◽  
...  
2017 ◽  
Vol 26 (9) ◽  
pp. 095201 ◽  
Author(s):  
Ahmed Asaad I Khalil ◽  
Ashraf I Hafez ◽  
Mahmoud E Elgohary ◽  
Mohamed A Morsy

1989 ◽  
Vol 50 (C8) ◽  
pp. C8-175-C8-177 ◽  
Author(s):  
N. M. MISKOVSKY ◽  
J. HE ◽  
P. H. CUTLER ◽  
M. CHUNG
Keyword(s):  

Author(s):  
F. Beaudoin ◽  
P. Perdu ◽  
C. DeNardi ◽  
R. Desplats ◽  
J. Lopez ◽  
...  

Abstract Ultra-short pulse laser ablation is applied to IC backside sample preparation. It is contact-less, non-thermal, precise and can ablate the various types of material present in IC packages. This study concerns the optimization of ultra-short pulse laser ablation for silicon thinning. Uncontrolled silicon roughness and poor uniformity of the laser thinned cavity needed to be tackled. Special care is taken to minimize the silicon RMS roughness to less than 1µm. Application to sample preparation of 256Mbit devices is presented.


2016 ◽  
Vol 87 (2) ◽  
pp. 02A913
Author(s):  
M. J. Segal ◽  
R. A. Bark ◽  
R. Thomae ◽  
E. E. Donets ◽  
E. D. Donets ◽  
...  

2009 ◽  
Vol 255 (17) ◽  
pp. 7605-7609 ◽  
Author(s):  
D.P. Korfiatis ◽  
K.-A. Th. Thoma ◽  
J.C. Vardaxoglou

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