Hard plasma chemical coatings based on silicon carbon nitride
2007 ◽
Vol 46
(11-12)
◽
pp. 543-549
◽
2004 ◽
Vol 58
(27-28)
◽
pp. 3467-3469
◽
2001 ◽
2013 ◽
Vol 25
◽
pp. 41-47
◽
2015 ◽
Vol 339
◽
pp. 102-108
◽
2013 ◽
Vol 143
(1)
◽
pp. 223-227
◽
2010 ◽
Vol 49
(5)
◽
pp. 05FE02
◽
Keyword(s):
2011 ◽
Vol 88
(8)
◽
pp. 2338-2341
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