Fabrication and gas sensing properties of α-Fe2O3 thin film prepared by plasma enhanced chemical vapor deposition (PECVD)

2001 ◽  
Vol 77 (1-2) ◽  
pp. 221-227 ◽  
Author(s):  
Eun-Tae Lee ◽  
Gun-Eik Jang ◽  
Chang Kyo Kim ◽  
Dae-Ho Yoon
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Gas Sensing ◽  
Chemical Vapor ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Fe2o3 Thin Film

Tantalum and Titanium doped In2O3 Thin Films by Aerosol-Assisted Chemical Vapor Deposition and their Gas Sensing Properties

2012 ◽  
Vol 24 (15) ◽  
pp. 2864-2871 ◽  
Author(s):  
Leanne G. Bloor ◽  
Joe Manzi ◽  
Russell Binions ◽  
Ivan P. Parkin ◽  
David Pugh ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Gas Sensing ◽  
Chemical Vapor ◽  
Sensing Properties ◽  
Gas Sensing Properties

The Gas‐Sensing Properties of Tin Oxide Thin Films Deposited by Metallorganic Chemical Vapor Deposition

1997 ◽  
Vol 144 (1) ◽  
pp. 295-299 ◽  
Author(s):  
Juliette R. Brown ◽  
Melvyn T. Cheney ◽  
Peter W. Haycock ◽  
David J. Houlton ◽  
Anthony C. Jones ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Tin Oxide ◽  
Vapor Deposition ◽  
Gas Sensing ◽  
Chemical Vapor ◽  
Oxide Thin Films ◽  
Sensing Properties ◽  
Gas Sensing Properties

Gas-sensing properties of poly(p-xylylene) - titanium thin film nanocomposite, prepared by vapor deposition polymerization

2020 ◽  
Vol 320 ◽  
pp. 128367
Author(s):  
Alexey Yu. Khnykov ◽  
Artem Yu. Vdovichenko ◽  
Pavel V. Morozov ◽  
Sergei A. Zavyalov ◽  
Vitaliy G. Shevchenko ◽  
...  
Keyword(s):  
Thin Film ◽  
Vapor Deposition ◽  
Gas Sensing ◽  
Sensing Properties ◽  
Titanium Thin Film ◽  
Gas Sensing Properties ◽  
Thin Film Nanocomposite
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