Tantalum and Titanium doped In2O3 Thin Films by Aerosol-Assisted Chemical Vapor Deposition and their Gas Sensing Properties

2012 ◽  
Vol 24 (15) ◽  
pp. 2864-2871 ◽  
Author(s):  
Leanne G. Bloor ◽  
Joe Manzi ◽  
Russell Binions ◽  
Ivan P. Parkin ◽  
David Pugh ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Gas Sensing ◽  
Chemical Vapor ◽  
Sensing Properties ◽  
Gas Sensing Properties

The Gas‐Sensing Properties of Tin Oxide Thin Films Deposited by Metallorganic Chemical Vapor Deposition

1997 ◽  
Vol 144 (1) ◽  
pp. 295-299 ◽  
Author(s):  
Juliette R. Brown ◽  
Melvyn T. Cheney ◽  
Peter W. Haycock ◽  
David J. Houlton ◽  
Anthony C. Jones ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Tin Oxide ◽  
Vapor Deposition ◽  
Gas Sensing ◽  
Chemical Vapor ◽  
Oxide Thin Films ◽  
Sensing Properties ◽  
Gas Sensing Properties

Gas Sensing Properties of Columnar CeO2 Nanostructures Prepared by Chemical Vapor Deposition

2008 ◽  
Vol 8 (2) ◽  
pp. 1012-1016 ◽  
Author(s):  
Davide Barreca ◽  
Elisabetta Comini ◽  
Alberto Gasparotto ◽  
Chiara Maccato ◽  
Cinzia Maragno ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Sensors ◽  
Vapor Deposition ◽  
Gas Sensing ◽  
Chemical Vapor ◽  
Operating Conditions ◽  
Working Temperature ◽  
Gas Sensing Properties ◽  
Resistive Gas Sensors ◽  
Higher Sensitivity

Columnar CeO2 nanostructures are grown on alumina substrates by a template- and catalyst-free Chemical Vapor Deposition (CVD) approach and subsequently tested as resistive gas sensors of CH3COCH3, H2, NO2. The sensor response is stable and reproducible throughout the whole working temperature range (200–500 °C) and directly dependent on the analyte gas and the adopted operating conditions. The higher sensitivity with respect to that displayed by continuous CeO2 thin films demonstrates the potential of fabricating nanostructured sensing devices characterized by improved functional performances.

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