Velocity measurement technique for high-speed targets based on digital fine spectral line tracking

2006 ◽  
Vol 17 (1) ◽  
pp. 6-12 ◽  
Author(s):  
Wen Shuliang ◽  
Yuan Qi
Keyword(s):  
Spectral Line ◽  
Measurement Technique ◽  
Velocity Measurement ◽  
High Speed ◽  
Line Tracking

Ripple Technique; a Novel Non-Contact Wafer Emissivity and Temperature Method for RTP

1991 ◽  
Vol 224 ◽  
Author(s):  
C. Schietinger ◽  
B. Adams ◽  
C. Yarling
Keyword(s):  
Optical Fiber ◽  
Measurement Technique ◽  
Thermal Processing ◽  
High Speed ◽  
Rapid Thermal Processing ◽  
Wafer Surface ◽  
Speed Measurement ◽  
Temperature Method ◽  
Emissivity Measurement ◽  
Emissivity Measurements

AbstractA novel wafer temperature and emissivity measurement technique for rapid thermal processing (RTP) is presented. The ‘Ripple Technique’ takes advantage of heating lamp AC ripple as the signature of the reflected component of the radiation from the wafer surface. This application of Optical Fiber Thermometry (OFT) allows high speed measurement of wafer surface temperatures and emissivities. This ‘Ripple Technique’ is discussed in theoretical and practical terms with wafer data presented. Results of both temperature and emissivity measurements are presented for RTP conditions with bare silicon wafers and filmed wafers.

Photonic Doppler velocimetry used for instant velocity measurement of high-speed small flyer

2016 ◽  
Vol 45 (12) ◽  
pp. 1217001 ◽  
Author(s):  
吴立志 Wu Lizhi ◽  
陈少杰 Chen Shaojie ◽  
叶迎华 Ye Yinghua ◽  
沈瑞琪 Shen Ruiqi ◽  
刘卫 Liu Wei
Keyword(s):  
Velocity Measurement ◽  
High Speed ◽  
Doppler Velocimetry ◽  
Photonic Doppler Velocimetry

Experimental results for high-speed jitter measurement technique

2005 ◽  
Author(s):  
K. Taylor ◽  
B. Nelson ◽  
A. Chong ◽  
H. Nguyen ◽  
H. Lin ◽  
...  
Keyword(s):  
Measurement Technique ◽  
High Speed ◽  
Experimental Results ◽  
Jitter Measurement
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