Gas Phase Chemical Processes

2021 ◽  
pp. 154-209
Keyword(s):  
Gas Phase ◽  
Chemical Processes ◽  
Phase Chemical

A Chemical Study of Photo-CVD of Silicon Nitride in Mercury-Sensitized Reactions Between Silane and Ammonia

1987 ◽  
Vol 101 ◽  
Author(s):  
Ching-Hsong Wu
Keyword(s):  
Silicon Nitride ◽  
Gas Phase ◽  
Isotope Labeling ◽  
Chemical Study ◽  
Chemical Processes ◽  
Chemical Characteristics ◽  
Experimental Conditions ◽  
Transient Intermediates ◽  
Labeling Method ◽  
Phase Chemical

ABSTRACTA photochemical system of mercury-sensitized reactions between silane and ammonia was studied to elucidate the gas-phase chemical processes involved in photo-CVD of silicon nitride. Several transient intermediates were detected and identified as silylated amines by the mass spectrometric isotope labeling method. These compounds containing both Si and N atoms appeared to be the precursors of silicon nitride. The chemical characteristics of silylated amines were studied under different experimental conditions. The reactivity and possible reaction paths for the formation of silylamine are discussed.

scholarly journals Low Temperature Experiments on Gas-Phase Chemical Processes

2000 ◽  
Vol 197 ◽  
pp. 237-250 ◽  
Author(s):  
B. R. Rowe ◽  
C. Rebrion Rowe ◽  
A. Canosa
Keyword(s):  
Low Temperature ◽  
Reaction Kinetics ◽  
Gas Phase ◽  
Low Temperatures ◽  
Chemical Processes ◽  
Experimental Results ◽  
Phase Chemical

A review of the most recent experimental results concerning reaction kinetics at low temperatures is presented, most of them having been obtained using the CRESU technique. Some astrochemical consequences are also highlighted.

Synthesis of polymorphic titanium oxide nanoparticles by a rapid gas-phase chemical reaction

2016 ◽  
Vol 26 (2) ◽  
pp. 157-159 ◽  
Author(s):  
Ning Luo ◽  
Hong Wen Jing ◽  
Zhan Guo Ma ◽  
Weidong Liu ◽  
Liangchi Zhang ◽  
...  
Keyword(s):  
Gas Phase ◽  
Titanium Oxide ◽  
Chemical Reaction ◽  
Oxide Nanoparticles ◽  
Titanium Oxide Nanoparticles ◽  
Phase Chemical

XPS analysis of NH3 plasma-treated polystyrene films utilizing gas phase chemical modification

1988 ◽  
Vol 26 (2) ◽  
pp. 559-572 ◽  
Author(s):  
Youichi Nakayama ◽  
Takayuki Takahagi ◽  
Fusami Soeda ◽  
Kenji Hatada ◽  
Shoji Nagaoka ◽  
...  
Keyword(s):  
Chemical Modification ◽  
Gas Phase ◽  
Xps Analysis ◽  
Phase Chemical

Time-resolved IR chemiluminescence in gas-phase chemical kinetics

1999 ◽  
Vol 68 (3) ◽  
pp. 171-181 ◽  
Author(s):  
Evgenii N Chesnokov ◽  
Viktor N Panfilov
Keyword(s):  
Gas Phase ◽  
Chemical Kinetics ◽  
Time Resolved ◽  
Phase Chemical
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