Microdiffraction in Dedicated STEM
Microdiffraction in dedicated STEM instruments has shown considerable promise as a source of microanalytical information. A major problem has been the relatively inefficient sequential methods used to obtain the diffraction pattern. The apparatus shown schematically in Fig. 1 has facilitated parallel viewing and recording of diffraction patterns in the HB5 STEM. The equipment is robust, low cost and can be installed with no modifications to the microscope.A series of diffraction patterns were recorded under identical conditions at a (110) zone axis in an Al-4% Cu foil shown in Fig. 2(a) to allow direct comparison of sequential and parallel recording methods. The thickness in this part of the foil was ∼220 nm as measured from the projected widths of θ' plates. The selected area “rocking beam” images in Figs. 2(b) and (d) are clearly noisy, suffer from scan distortions and their usefulness for phase identification and crystal orientation is severely limited.