A quantitative investigation of thin specimen X-ray spectra in the TEM
In electron probe x-ray microanalysis, the observed x-ray spectra are degraded by the presence of both characteristic and bremsstrahlung x-rays from the regions of the specimen which are not under analysis and from the solid materials near the specimen. These x-rays are generated by electrons scattered from the probe by the specimen and by stray electrons originally outside the probe. The extraneous bremsstrahlung x-rays form a component of the observed continuum which is only indirectly dependent on the nature of the specimen. This effect is particularly undesirable in the analysis of thin biological specimens in the transmission electron microscope since the continuum level is commonly used in quantitative analysis as a measure of specimen mass thickness. Experiments have therefore been performed to investigate the magnitude of the extraneous radiation and to evaluate the success of attempts to reduce it. These have been detailed elsewhere (Nicholson et al. 1977).