In situ TEM of silicon oxidation
1992 ◽
Vol 50
(1)
◽
pp. 324-325
Keyword(s):
Oxidation is an important process in materials science. Silicon oxidation is particularly relevant for electronic device fabrication, but it also provides a model system. We report here the use of in-situ TEM for the examination of the microstructural details of the oxidation process.
1992 ◽
Vol 50
(2)
◽
pp. 1338-1339
Keyword(s):
2013 ◽
Vol 48
(14)
◽
pp. 4851-4859
◽