Prospects for compositional imaging with the atom probe microscope
For the purposes of analytical characterization on the atomic scale, the ultimate instrument would identify every atom in a sample and determine its position with atomic-scale resolution. The recently developed positionsensitive atom probe (POSAP) comes as close as yet possible to this goal. This is the only experimental technique which can analyze the three-dimensional (3D) composition of a sample on a sub-nanometer scale.By adding a position-sensitive detector (PSD) to a conventional atom probe/field ion microscope, a 3D data structure with position-correlated compositional analysis is acquired. The 3D data are stored on a computer and may be examined for structural and compositional information at an atomic level. Note that, because it uses time-of-flight mass spectroscopy, all elements and their isotopes are detected in this way with equal proficiency. Usually, the evaporation rate is mediated by pulsing the field on the specimen. This approach, however, severely limits the data acquisition rate (about 1 atom per second) and mass resolution (about 1 part in 30).