Dislocation contrast in high-angle hollow-cone dark-field TEM

Author(s):  
Z. L. WANG

Dislocations were imaged using the high-angle hollow-cone dark-field transmission electron microscopy (HADF-TEM) technique. Experiments were performed using a Philips CM30 TEM at 300 kV Dislocations and grain boundaries show bright contrast in HADF-TEM images and there are no contrast reversals with thickness or defocus. The dislocation contrast shows no dramatic variation when the average semi-conical angle θ was increased from 40 to 110 mrad, but does show strong dependence on the diffracting conditions that are set up for the corresponding on-axis bright-field (BF) TEM image (Fig. 1). Under the "one-beam" (random orientation without strong diffraction) reflection condition (Figs, 1a and 1a'), the visibility of the dislocations is poor in either the BF-TEM or the HADF-TEM image. Under the two-beam diffracting condition (Figs, 1b and 1b') both BF-TEM and HADF-TEM images show optimized contrast. The features appearing in the HADF-TEM images have a good one-to-one correspondence with the features shown in the corresponding BF-TEM images; the dislocation contrast disappears in the HADF-TEM images if the condition g·b = 0 is satisfied in the BF-TEM images, where b is the Burgers vector (Fig 2).

Author(s):  
Martina Luysberg ◽  
Marc Heggen ◽  
Karsten Tillmann

The FEI Titan Tecnai G2 F20 is a versatile transmission electron microscope which is equipped with a Gatan Tridiem 863P post column image filter (GIF) and a high angle energy dispersive X-ray (EDX) detector. This set up allows for a variety of experiments such as conventional imaging and diffraction, recording of bright- and dark-field scanning transmission electron microscopy (STEM) images, or acquiring elemental maps extracted from energy electron loss spectra (EELS) or EDX signals.


1997 ◽  
Vol 3 (S2) ◽  
pp. 479-480
Author(s):  
Hiroshi Kakibayashi ◽  
Kuniyasu Nakamura ◽  
Ruriko Tsuneta

The performance of electronic devices, such as dynamic random access memories, is degraded by contamination due to impurity atoms as well as crystalline imperfections created during processing. The evaluation of those degradation causes is generally done using an analytical transmission electron microscope. The information obtained, however, is limited to two-dimensional images of the specimen as seen from a single direction. Advanced semiconductor devices with finer-pattern structures are expected to exhibit larger fluctuations in device performance due to the spatial distribution of the faults. A new method has thus been examined to determine the atomic species and to reconstruct three-dimensional (3-D) images of the specimen structure by using high-angle hollow-cone dark-field transmission electron microscopy (HADF-TEM).A incident angle controller was added to a conventional TEM to control the electron-beam deflection coils. This enables the incident electron beam to be inclined and rotated, providing hollow-cone illumination of the specimen, as shown in Fig. 1.


Author(s):  
W. Goldfarb ◽  
W. Krakow ◽  
D. Ast ◽  
B. Siegel

Bright field tilted beam illumination is commonly used to demonstrate the resolution of a transmission electron microscope by forming lattice fringes.The unscattered and diffracted beams are symmetrically positioned on either side of the optic axis so that the spherical, defocus and chromatic abberations will cancel. The cancellation of chromatic aberration is particularly important. However, the balancing of aberration occurs not only for the one diffraction direction across the axis from the unscattered beam but for an entire hollow cone of scattering vectors centered on the microscope axis and passing through the unscattered beam. This hollow cone projects as a circle in the back focal plane (BFP) of the microscope with zero net aberrations for one sideband of the scattering. Because the image amplitude is squared to form the image intensity, the single ring of cancelled aberrations in the BFP corresponds to a symmetrical pair of rings in the spatial power spectra of the micrograph. These ring pairs show up strongly in the experimental diffractograms, Figures 1, 3 and 4.


Author(s):  
Max Haider

One advantage of scanning transmission electron microscopy (STEM) over conventional TEM which is often cited is the capability to simultaneously record the various scattered electrons with properly designed detectors. So far, this advantage has only been utilized to record bright-field or inelastic and dark-field (low and high angle) images in parallel. However, it has not been used to record all transmitted electrons separately according to their scattering angle. We developed a flexible multichannel detector system based on a silicon chip which has been fabricated to our specifications. This detector consists of 30 rings which are split into 4 quadrants (see Fig. 1), and is operated in an electron counting mode. The rings can be used to separate the electrons according to their scattering angle for low and high angle dark-field images, to obtain the various phase-contrast images and to normalize the signals by the sum of all detectors. The system records the signals of the 120 channels in parallel and the counts of each channel can be combined in an integer processing unit in order to form 8 different images.


Author(s):  
Z. L. Wang

It has been demonstrated that dark-field, atomic number sensitive images can be obtained either inscanning transmission electron microscopy (STEM) using a high-angle annular dark field detector (HAADF) or in transmission electron microscopy (TEM) using an on-axis objective aperture under the hollow cone beam illumination. The images are formed using the high-angle diffusely scattered electrons presuming that the high angle Bragg reflections are weak. Diffuse scattering can be generated by both thermal diffuse scattering (TDS) and Huang scattering, The local lattice distortion due to the presence of defects, dislocations, lattice relaxation, surfaces, or interfaces, is a source for generating diffuse scattering (or Huang scattering). In these cases, the final image contrast may not be sensitive to the local composition, thus eliminating the Zcontrast effect. The diffraction effect in the imagesformed by diffusely scattered electrons is easily seen in the TEM case. In the diffraction pattern of gold shown in Fig. 1, <110> streaks produced by TDS are clearly seen. The bright field image shows some bending and strain contrast. Most of the features observed in the bright field imageappear in the dark field image of the diffusely scattered electrons.


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