Application-driven computerisation of the energy filtering Electron Microscope for imaging and analysis
An Energy Filtering Electron Microscope (EFEM) with an integrated imaging energy loss spectrometer offers many different methodes for imaging and analysis. Thus there is a wealth of different information from a specimen. They are all related to the structure as well as to the physical and chemical composition of a specimen. There are e.g. geometrical and statistical information from brightfield and darkfield images, information about crystalline structures from diffraction images, chemical information from electron energy loss spectra and highly resolved elemental distribution images. Most of this information is detail information not final results. To get final results, detail information have to be related and processed. To do this reliably and economically it is important to have a powerful and flexible computer system permanently available on the microscope to record, enhance, process, evalute, analyse, and store images, spectra and data. An important point is the use of the computer capabilities to perform automatic control of the microscope.