The NCEM One-Angstrom Microscope Project Reaches 0.89Å Resolution
Transmission electron microscopy to a resolution of 0.89Å has been achieved at the National Center for Electron Microscopy and is available to electron microscopists who have a requirement for this level of resolution. Development of this capability commenced in 1993, when the National Center for Electron Microscopy agreed to fund a proposal for a unique facility, a one- Ångstrom microscope (OÅM).2 The OÅM project provides materials scientists with transmission electron microscopy at a resolution better than one Angstrom by exploiting the significantly higher information limit of a FEG-TEM over its Scherzer resolution limit. To turn the misphased information beyond the Scherzer limit into useful resolution, the OÅM requires extensive image reconstruction. One method chosen was reconstruction from off-axis holograms; another was reconstruction from focal series of underfocused images. The OÅM is then properly a combination of a FEG-TEM (a CM300FEG-UT) together with computer software able to generate sub-Ångstrom images from experimental images obtained on the FEG-TEM.Before the advent of the OÅM, NCEM microscopists relied on image simulation to obtain structural information beyond the TEM resolution limit.