scholarly journals Recent Advances in Electron Tomography: TEM and HAADF-STEM Tomography for Materials Science and Semiconductor Applications

2005 ◽  
Vol 11 (5) ◽  
pp. 378-400 ◽  
Author(s):  
Christian Kübel ◽  
Andreas Voigt ◽  
Remco Schoenmakers ◽  
Max Otten ◽  
David Su ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
High Resolution ◽  
Structural Information ◽  
Electron Tomography ◽  
Semiconductor Devices ◽  
Three Dimensional ◽  
Crystalline Materials ◽  
Transmission Electron ◽  
Stem Tomography

Electron tomography is a well-established technique for three-dimensional structure determination of (almost) amorphous specimens in life sciences applications. With the recent advances in nanotechnology and the semiconductor industry, there is also an increasing need for high-resolution three-dimensional (3D) structural information in physical sciences. In this article, we evaluate the capabilities and limitations of transmission electron microscopy (TEM) and high-angle-annular-dark-field scanning transmission electron microscopy (HAADF-STEM) tomography for the 3D structural characterization of partially crystalline to highly crystalline materials. Our analysis of catalysts, a hydrogen storage material, and different semiconductor devices shows that features with a diameter as small as 1–2 nm can be resolved in three dimensions by electron tomography. For partially crystalline materials with small single crystalline domains, bright-field TEM tomography provides reliable 3D structural information. HAADF-STEM tomography is more versatile and can also be used for high-resolution 3D imaging of highly crystalline materials such as semiconductor devices.

Three-Dimensional Structure of Helical and Zigzagged Nanowires Using Electron Tomography

2008 ◽  
Vol 1144 ◽  
Author(s):  
Han Sung Kim ◽  
Yoon Myung ◽  
Chang Hyun Kim ◽  
Seung Yong Bae ◽  
Jae-Pyoung Ahn ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
High Resolution ◽  
Electron Tomography ◽  
Three Dimensional ◽  
Helical Structure ◽  
Axial Direction ◽  
Dimensional Structure ◽  
Gan Nanowires ◽  
Transmission Electron

ABSTRACTElectron tomography and high-resolution transmission electron microscopy were used to characterize the unique three-dimensional structures of helical or zigzagged GaN, ZnGa2O4 and Zn2SnO4 nanowires. The helical GaN nanowires adopt a helical structure that consists of six equivalent <0-111> growth directions with the axial [0001] direction. The ZnGa2O4 nanosprings have four equivalent <011> growth directions with the [001] axial direction. The zigzagged Zn2SnO4 nanowires consisted of linked rhombohedrons structure having the side edges matched to the <011> direction, and the [111] axial direction.

Three-Dimensional Dispersion of Nano-Fillers in Soft Composite as Revealed by Transmission Electron Microscopy/Electron Tomography (3D-TEM)

2006 ◽  
Vol 514-516 ◽  
pp. 353-358 ◽  
Author(s):  
Shinzo Kohjiya
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Carbon Black ◽  
Natural Rubber ◽  
Structural Information ◽  
Electron Tomography ◽  
Nano Composites ◽  
Nano Structure ◽  
Transmission Electron ◽  
Particulate Silica

. Generally rubber products are a typical soft material, and a composite of a nano-filler (typically, carbon black or particulate silica) and a rubber (natural rubber and various synthetics are used). The properties of these soft nano-composites have been well known to depend on the dispersion of the nano-filler in the rubbery matrix. The most powerful tool for the elucidation of it has been transmission electron microscopy (TEM). The microscopic techniques are based on the projection of 3-dimensional (3D) body on a plane (x, y plane), thus the structural information along the thickness (z axis) direction of the sample is difficult to obtain. This paper describes our recent results on the dispersion of carbon black (CB) and particulate silica in natural rubber (NR) matrix observed by TEM combined with electron tomography (3D-TEM) technique, which enabled us to obtain images of 3D nano-structure of the sample. Thus, 3D images of CB and silica in NR matrix are visualized and analyzed in this communication. These results are precious ones for the design of soft nano-composites, and the technique will become an indispensable one in nanotechnology.

Chemical Nano-tomography of Self-assembled Ge-Si:Si(001) Islands from Quantitative High Resolution Transmission Electron Microscopy

2009 ◽  
Vol 1184 ◽  
Author(s):  
Luciano Andrey Montoro ◽  
Marina Leite ◽  
Daniel Biggemann ◽  
Fellipe Grillo Peternella ◽  
Kees Joost Batenburg ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
High Resolution ◽  
Spatial Resolution ◽  
High Spatial Resolution ◽  
Three Dimensional ◽  
Precise Knowledge ◽  
Transmission Electron ◽  
Self Consistent ◽  
Chemical Distribution

AbstractThe knowledge of composition and strain with high spatial resolution is highly important for the understanding of the chemical and electronic properties of alloyed nanostructures. Several applications require a precise knowledge of both composition and strain, which can only be extracted by self-consistent methodologies. Here, we demonstrate the use of a quantitative high resolution transmission electron microscopy (QHRTEM) technique to obtain two-dimensional (2D) projected chemical maps of epitaxially grown Ge-Si:Si(001) islands, with high spatial resolution, at different crystallographic orientations. By a combination of these data with an iterative simulation, it was possible infer the three-dimensional (3D) chemical arrangement on the strained Ge-Si:Si(001) islands, showing a four-fold chemical distribution which follows the nanocrystal shape/symmetry. This methodology can be applied for a large variety of strained crystalline systems, such as nanowires, epitaxial islands, quantum dots and wells, and partially relaxed heterostructures.

An approach to quantitative high-resolution transmission electron microscopy of crystalline materials

1995 ◽  
Vol 58 (2) ◽  
pp. 131-155 ◽  
Author(s):  
C. Kisielowski ◽  
P. Schwander ◽  
F.H. Baumann ◽  
M. Seibt ◽  
Y. Kim ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
High Resolution ◽  
Crystalline Materials ◽  
Transmission Electron

Three-Dimensional Imaging of Shear Band Produced by ECAP Process in Al-Ag Alloy

2006 ◽  
Vol 503-504 ◽  
pp. 603-608
Author(s):  
Koji Inoke ◽  
Kenji Kaneko ◽  
Z. Horita
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Electron Tomography ◽  
Shear Bands ◽  
Three Dimensional ◽  
Angular Pressing ◽  
Ecap Process ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
The Matrix

A significant change in microstructure occurs during the application of severe plastic deformation (SPD) such as by equal-channel angular pressing (ECAP). In this study, intense plastic strain was imposed on an Al-10.8wt%Ag alloy by the ECAP process. The amount of strain was controlled by the numbers of passes. After 1 pass of ECAP, shear bands became visible within the matrix. With increasing numbers of ECAP passes, the fraction of shear bands was increased. In this study, the change in microstructures was examined by three-dimensional electron tomography (3D-ET) in transmission electron microscopy (TEM) or scanning transmission electron microscopy (STEM). With this 3D-ET method, it was possible to conduct a precise analysis of the sizes, widths and distributions of the shear bands produced by the ECAP process. It is demonstrated that the 3D-ET method is promising to understand mechanisms of microstructural refinement using the ECAP process.

Three-Dimensional Chemistry of Multiphase Nanomaterials by Energy-Filtered Transmission Electron Microscopy Tomography

2012 ◽  
Vol 18 (5) ◽  
pp. 1118-1128 ◽  
Author(s):  
Lucian Roiban ◽  
Loïc Sorbier ◽  
Christophe Pichon ◽  
Pascale Bayle-Guillemaud ◽  
Jacques Werckmann ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Electron Tomography ◽  
Three Dimensional ◽  
Point Of View ◽  
Analysis Tool ◽  
Shell Nanoparticles ◽  
3D Nanostructures ◽  
Transmission Electron ◽  
Silica Alumina

AbstractA three-dimensional (3D) study of multiphase nanostructures by chemically selective electron tomography combining tomographic approach and energy-filtered imaging is reported. The implementation of this technique at the nanometer scale requires careful procedures for data acquisition, computing, and analysis. Based on the performances of modern transmission electron microscopy equipment and on developments in data processing, electron tomography in the energy-filtered imaging mode is shown to be a very appropriate analysis tool to provide 3D chemical maps at the nanoscale. Two examples highlight the usefulness of analytical electron tomography to investigate inhomogeneous 3D nanostructures, such as multiphase specimens or core-shell nanoparticles. The capability of discerning in a silica-alumina porous particle the two different components is illustrated. A quantitative analysis in the whole specimen and toward the pore surface is reported. This tool is shown to open new perspectives in catalysis by providing a way to characterize precisely 3D nanostructures from a chemical point of view.

TEM and STEM Electron Tomography Analysis of Amorphous Alloys CoP-CoNiP System

2012 ◽  
Vol 590 ◽  
pp. 9-12 ◽  
Author(s):  
Tamara Mekhantseva ◽  
Oleg Voitenko ◽  
Ilya Smirnov ◽  
Evgeny Pustovalov ◽  
Vladimir Plotnikov ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
High Resolution ◽  
Amorphous Alloys ◽  
Electron Tomography ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
High Resolution Images ◽  
Electron Energy Loss ◽  
Tomography Analysis

This paper covers the analysis of amorphous alloys CoP-CoNiP system by means of high-resolution transmission electron microscopy (HRTEM), scanning transmission electron microscopy and electron tomography. The last years have seen a sufficient progress in the analysis of nanomaterials structure with the help of high resolution tomography. This progress was motivated by the development of microscopes equipped with aberration correctors and specialized sample holders which allow reaching the tilts angles up to ±80°. The opportunities delivered by the method of electron tomography sufficiently grow when producing high resolution images and using chemical analysis, such as X-Ray energy-dispersive microanalysis and electron energy loss spectroscopy (EELS).

scholarly journals Improvements on marker-free images alignment for electron tomography

2020 ◽  
Author(s):  
C.O.S. Sorzano ◽  
F. de Isidro-Gómez ◽  
E. Fernández-Giménez ◽  
D. Herreros ◽  
S. Marco ◽  
...  
Keyword(s):  
Structural Information ◽  
Electron Tomography ◽  
Three Dimensional ◽  
Reconstruction Process ◽  
New Approach ◽  
Alignment Procedure ◽  
Transmission Electron ◽  
Marker Free ◽  
Stem Tomography

AbstractElectron tomography is a technique to obtain three-dimensional structural information of samples. However, the technique is limited by shifts occurring during acquisition that need to be corrected before the reconstruction process. In 2009, we proposed an approach for post-acquisition alignment of tilt series images. This approach was marker-free, based on patch tracking and integrated in free software. Here, we present improvements to the method to make it more reliable, stable and accurate. In addition, we modified the image formation model underlying the alignment procedure to include different deformations occurring during acquisition. We propose a new way to correct these computed deformations to obtain reconstructions with reduced artifacts. The new approach has demonstrated to improve the quality of the final 3D reconstruction, giving access to better defined structures for different transmission electron tomography methods: resin embedded STEM-tomography and cryo-TEM tomography. The method is freely available in TomoJ software.

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