Nanosilicon Crystallite Embedded into Amorphous Silicon Matrix: Polymorphous SiliconThin Film, Obtained by Plasma Enhanced Chemical Vapor Deposition
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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009
1995 ◽
pp. 243-282
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1999 ◽
Vol 17
(6)
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pp. 3240-3245
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2007 ◽
Vol 154
(5)
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pp. G122
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1998 ◽
Vol 16
(2)
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pp. 483
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