Validation of Minimum Electron Beam Dosage on Characterization of Carbon-Depletion in ULK Dielectric Materials by EELS Quantifications
2018 ◽
Vol 24
(S1)
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pp. 1998-1999
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2016 ◽
Vol 22
(S3)
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pp. 334-335
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1988 ◽
Vol 46
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pp. 830-831
Keyword(s):
2016 ◽
Vol 442
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pp. 22-28
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Keyword(s):
2017 ◽
Vol 11
(1)
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pp. 1770303
2008 ◽
Vol 112
(15)
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pp. 5856-5859
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2012 ◽
Vol 90
(2)
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pp. 1038-1045
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