scholarly journals Correction to Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero Oxidation State Precursor

2018 ◽  
Vol 30 (24) ◽  
pp. 8983-8984 ◽  
Author(s):  
Dustin Z. Austin ◽  
Melanie A. Jenkins ◽  
Derryl Allman ◽  
Sallie Hose ◽  
David Price ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Oxidation State ◽  
Ruthenium Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor

2017 ◽  
Vol 29 (3) ◽  
pp. 1107-1115 ◽  
Author(s):  
Dustin Z. Austin ◽  
Melanie A. Jenkins ◽  
Derryl Allman ◽  
Sallie Hose ◽  
David Price ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Oxidation State ◽  
Ruthenium Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Thin Films from a Zero-Valent (1,5-Hexadiene)(1-isopropyl-4-methylbenzene)ruthenium Complex and O2

2014 ◽  
Vol 26 (24) ◽  
pp. 7083-7090 ◽  
Author(s):  
Hyo Jun Jung ◽  
Jeong Hwan Han ◽  
Eun Ae Jung ◽  
Bo Keun Park ◽  
Jin-Ha Hwang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Ruthenium Complex ◽  
Ruthenium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Oxidation State Discrimination in the Atomic Layer Deposition of Vanadium Oxides

2017 ◽  
Vol 29 (15) ◽  
pp. 6238-6244 ◽  
Author(s):  
Matthew S. Weimer ◽  
In Soo Kim ◽  
Peijun Guo ◽  
Richard D. Schaller ◽  
Alex B. F. Martinson ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Oxidation State ◽  
Atomic Layer ◽  
Vanadium Oxides ◽  
State Discrimination ◽  
Layer Deposition

Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition

2014 ◽  
Vol 610 ◽  
pp. 529-539 ◽  
Author(s):  
Ji-Yoon Park ◽  
Seungmin Yeo ◽  
Taehoon Cheon ◽  
Soo-Hyun Kim ◽  
Min-Kyu Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Ruthenium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Improved Cu2O-Based Solar Cells Using Atomic Layer Deposition to Control the Cu Oxidation State at the p-n Junction

2014 ◽  
Vol 4 (11) ◽  
pp. 1301916 ◽  
Author(s):  
Sang Woon Lee ◽  
Yun Seog Lee ◽  
Jaeyeong Heo ◽  
Sin Cheng Siah ◽  
Danny Chua ◽  
...  
Keyword(s):  
Solar Cells ◽  
Atomic Layer Deposition ◽  
Oxidation State ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Cu Oxidation
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