Atomic Layer Deposition of Ruthenium and Ruthenium-oxide ThinFilms by Using a Ru(EtCp)$_{2}$ Precursor and Oxygen Gas

2009 ◽  
Vol 55 (1) ◽  
pp. 32-37 ◽  
Author(s):  
Woo-Hee Kim ◽  
Sang-Joon Park ◽  
DoYoung Kim ◽  
Hyungjun Kim
Keyword(s):  
Atomic Layer Deposition ◽  
Ruthenium Oxide ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Oxygen Gas

scholarly journals Correction to Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero Oxidation State Precursor

2018 ◽  
Vol 30 (24) ◽  
pp. 8983-8984 ◽  
Author(s):  
Dustin Z. Austin ◽  
Melanie A. Jenkins ◽  
Derryl Allman ◽  
Sallie Hose ◽  
David Price ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Oxidation State ◽  
Ruthenium Oxide ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Elucidating the growth mechanism of ZnO films by atomic layer deposition with oxygen gas via isotopic tracking

2021 ◽  
Vol 9 (12) ◽  
pp. 4307-4315
Author(s):  
Tai Nguyen ◽  
Nathalie Valle ◽  
Jérôme Guillot ◽  
Jérôme Bour ◽  
Noureddine Adjeroud ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Growth Mechanism ◽  
Growth Process ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Zno Films ◽  
Layer Deposition ◽  
Oxygen Gas

The growth process of zinc oxide (ZnO) thin films by atomic layer deposition (ALD) accompanied by the presence of oxygen gas pulsing is investigated by means of the isotopic tracking of oxygen 18O from the water precursor and oxygen 16O from the gas.

Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor

2017 ◽  
Vol 29 (3) ◽  
pp. 1107-1115 ◽  
Author(s):  
Dustin Z. Austin ◽  
Melanie A. Jenkins ◽  
Derryl Allman ◽  
Sallie Hose ◽  
David Price ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Oxidation State ◽  
Ruthenium Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Thin Films from a Zero-Valent (1,5-Hexadiene)(1-isopropyl-4-methylbenzene)ruthenium Complex and O2

2014 ◽  
Vol 26 (24) ◽  
pp. 7083-7090 ◽  
Author(s):  
Hyo Jun Jung ◽  
Jeong Hwan Han ◽  
Eun Ae Jung ◽  
Bo Keun Park ◽  
Jin-Ha Hwang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Ruthenium Complex ◽  
Ruthenium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition

2014 ◽  
Vol 610 ◽  
pp. 529-539 ◽  
Author(s):  
Ji-Yoon Park ◽  
Seungmin Yeo ◽  
Taehoon Cheon ◽  
Soo-Hyun Kim ◽  
Min-Kyu Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Ruthenium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Ruthenium Oxide Nanotube Arrays Fabricated by Atomic Layer Deposition Using a Carbon Nanotube Template

2003 ◽  
Vol 15 (12) ◽  
pp. 1019-1022 ◽  
Author(s):  
Y.-S. Min ◽  
E.J. Bae ◽  
K.S. Jeong ◽  
Y.J. Cho ◽  
J.-H. Lee ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Atomic Layer Deposition ◽  
Ruthenium Oxide ◽  
Atomic Layer ◽  
Nanotube Arrays ◽  
Layer Deposition

Application of Atomic Layer Deposition in Dye-Sensitized Photoelectrosynthesis Cells

2021 ◽  
Vol 3 (1) ◽  
pp. 59-71
Author(s):  
Degao Wang ◽  
Qing Huang ◽  
Weiqun Shi ◽  
Wei You ◽  
Thomas J. Meyer
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dye Sensitized ◽  
Layer Deposition
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