High-κ Lanthanum Zirconium Oxide Thin Film Dielectrics from Aqueous Solution Precursors

2017 ◽  
Vol 9 (12) ◽  
pp. 10897-10903 ◽  
Author(s):  
Keenan N. Woods ◽  
Tsung-Han Chiang ◽  
Paul N. Plassmeyer ◽  
Matthew G. Kast ◽  
Alexander C. Lygo ◽  
...  
Keyword(s):  
Thin Film ◽  
Aqueous Solution ◽  
Zirconium Oxide ◽  
Oxide Thin Film ◽  
Thin Film Dielectrics ◽  
Lanthanum Zirconium Oxide

Lanthanum Aluminum Oxide Thin-Film Dielectrics from Aqueous Solution

2015 ◽  
Vol 7 (3) ◽  
pp. 1678-1684 ◽  
Author(s):  
Paul N. Plassmeyer ◽  
Kevin Archila ◽  
John F. Wager ◽  
Catherine J. Page
Keyword(s):  
Thin Film ◽  
Aqueous Solution ◽  
Aluminum Oxide ◽  
Oxide Thin Film ◽  
Lanthanum Aluminum Oxide ◽  
Thin Film Dielectrics

scholarly journals Tunable high-κ ZrxAl1−xOy thin film dielectrics from all-inorganic aqueous precursor solutions

RSC Advances ◽  
2017 ◽  
Vol 7 (62) ◽  
pp. 39147-39152 ◽  
Author(s):  
K. N. Woods ◽  
E. C. Waddington ◽  
C. A. Crump ◽  
E. A. Bryan ◽  
T. S. Gleckler ◽  
...  
Keyword(s):  
Thin Film ◽  
Aqueous Solution ◽  
Dielectric Properties ◽  
Aluminum Oxide ◽  
Oxide Thin Film ◽  
Solution Route ◽  
Thin Film Dielectrics ◽  
Film Dielectric ◽  
Inorganic Aqueous Solution

An all-inorganic, aqueous solution route enables facile control of composition and optimization of zirconium aluminum oxide thin film dielectric properties.

Highly stable low-temperature aqueous solution-processed oxide thin-film transistors by the hydrogen injection and oxidation method

2018 ◽  
Vol 3 (2) ◽  
pp. 025005 ◽  
Author(s):  
Masashi Miyakawa ◽  
Mitsuru Nakata ◽  
Hiroshi Tsuji ◽  
Yoshihide Fujisaki
Keyword(s):  
Thin Film ◽  
Aqueous Solution ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Oxide Thin Film ◽  
Solution Processed ◽  
Oxidation Method

The bonding of hydrogenated and fluorinated diethers to Pt(111) and to zirconium oxide thin film

1992 ◽  
Vol 279 (3) ◽  
pp. A112
Author(s):  
K. Takeuchi ◽  
M. Salmeron ◽  
G.A. Somorjai
Keyword(s):  
Thin Film ◽  
Zirconium Oxide ◽  
Oxide Thin Film

A Solution Processed ZnO Thin Film

2012 ◽  
Vol 239-240 ◽  
pp. 1585-1588 ◽  
Author(s):  
Yuh Chung Hu ◽  
David T.W. Lin ◽  
Hai Lin Lee ◽  
Pei Zen Chang
Keyword(s):  
Thin Film ◽  
Aqueous Solution ◽  
Zinc Oxide ◽  
Low Cost ◽  
Zinc Acetate Dihydrate ◽  
Oxide Thin Film ◽  
Zno Thin Film ◽  
Acetate Dihydrate ◽  
Zinc Oxide Thin Film ◽  
Environmentally Friendly Process

The effect of Zinc-Oxide (ZnO) thin film annealed in different ambiences is presented. To achieve low cost and environmentally friendly process, ZnO aqueous solution is synthesized by dissolving zinc acetate dihydrate in deionized water directly. Zinc oxide aqueous solution of high solubility and stability is presented. High quality and dense Zinc oxide thin film is formed by spin coating. Annealing temperatures are in the range of 300 °C~500 °C, and annealing ambiences of both air and N2 are discussed.

Solution-processed indium-zinc-oxide thin-film transistors based on anodized aluminum oxide gate insulator modified with zirconium oxide

RSC Advances ◽  
2015 ◽  
Vol 5 (63) ◽  
pp. 51440-51445 ◽  
Author(s):  
Yuzhi Li ◽  
Linfeng Lan ◽  
Peng Xiao ◽  
Zhenguo Lin ◽  
Sheng Sun ◽  
...  
Keyword(s):  
Thin Film ◽  
Zirconium Oxide ◽  
Thin Film Transistors ◽  
Gate Insulator ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Anodized Aluminum ◽  
Anodized Aluminum Oxide ◽  
Solution Processed ◽  
Indium Zinc Oxide

Enhanced performance of solution-processed IZO-TFTs with ZrOx interlayer due to Al diffusion suppression.

Low-Temperature, Aqueous-Solution-Processed Zinc Tin Oxide Thin Film Transistor

2011 ◽  
Vol 50 (7R) ◽  
pp. 070201 ◽  
Author(s):  
Jee Ho Park ◽  
Won Jin Choi ◽  
Jin Young Oh ◽  
Soo Sang Chae ◽  
Woo Soon Jang ◽  
...  
Keyword(s):  
Thin Film ◽  
Aqueous Solution ◽  
Low Temperature ◽  
Tin Oxide ◽  
Thin Film Transistor ◽  
Oxide Thin Film ◽  
Solution Processed ◽  
Zinc Tin Oxide

Low-temperature aqueous solution processed fluorine-doped zinc tin oxide thin-film transistors

2012 ◽  
Vol 2 (1) ◽  
pp. 17-22 ◽  
Author(s):  
Jun-Hyuck Jeon ◽  
Young Hwan Hwang ◽  
JungHo Jin ◽  
Byeong-Soo Bae
Keyword(s):  
Thin Film ◽  
Aqueous Solution ◽  
Low Temperature ◽  
Tin Oxide ◽  
Thin Film Transistors ◽  
Oxide Thin Film ◽  
Solution Processed ◽  
Zinc Tin Oxide ◽  
Image Position

Abstract

Sign in / Sign up

Export Citation Format

Share Document