Lanthanum Aluminum Oxide Thin-Film Dielectrics from Aqueous Solution

2015 ◽  
Vol 7 (3) ◽  
pp. 1678-1684 ◽  
Author(s):  
Paul N. Plassmeyer ◽  
Kevin Archila ◽  
John F. Wager ◽  
Catherine J. Page
RSC Advances ◽  
2017 ◽  
Vol 7 (62) ◽  
pp. 39147-39152 ◽  
Author(s):  
K. N. Woods ◽  
E. C. Waddington ◽  
C. A. Crump ◽  
E. A. Bryan ◽  
T. S. Gleckler ◽  
...  

An all-inorganic, aqueous solution route enables facile control of composition and optimization of zirconium aluminum oxide thin film dielectric properties.


2017 ◽  
Vol 9 (12) ◽  
pp. 10897-10903 ◽  
Author(s):  
Keenan N. Woods ◽  
Tsung-Han Chiang ◽  
Paul N. Plassmeyer ◽  
Matthew G. Kast ◽  
Alexander C. Lygo ◽  
...  

2012 ◽  
Vol 239-240 ◽  
pp. 1585-1588 ◽  
Author(s):  
Yuh Chung Hu ◽  
David T.W. Lin ◽  
Hai Lin Lee ◽  
Pei Zen Chang

The effect of Zinc-Oxide (ZnO) thin film annealed in different ambiences is presented. To achieve low cost and environmentally friendly process, ZnO aqueous solution is synthesized by dissolving zinc acetate dihydrate in deionized water directly. Zinc oxide aqueous solution of high solubility and stability is presented. High quality and dense Zinc oxide thin film is formed by spin coating. Annealing temperatures are in the range of 300 °C~500 °C, and annealing ambiences of both air and N2 are discussed.


2018 ◽  
Vol 187 ◽  
pp. 93-97 ◽  
Author(s):  
Maurizio Zani ◽  
Vittorio Sala ◽  
Gabriele Irde ◽  
Silvia Maria Pietralunga ◽  
Cristian Manzoni ◽  
...  

2011 ◽  
Vol 50 (7R) ◽  
pp. 070201 ◽  
Author(s):  
Jee Ho Park ◽  
Won Jin Choi ◽  
Jin Young Oh ◽  
Soo Sang Chae ◽  
Woo Soon Jang ◽  
...  

1975 ◽  
Vol 17 (3) ◽  
pp. 273-275 ◽  
Author(s):  
C.H. Chen ◽  
J. Silcox

2010 ◽  
Vol 16 (47) ◽  
pp. 13925-13929 ◽  
Author(s):  
Manjunath Puttaswamy ◽  
Kenneth Brian Haugshøj ◽  
Leif Højslet Christensen ◽  
Peter Kingshott

2012 ◽  
Vol 2 (1) ◽  
pp. 17-22 ◽  
Author(s):  
Jun-Hyuck Jeon ◽  
Young Hwan Hwang ◽  
JungHo Jin ◽  
Byeong-Soo Bae

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