Atomic Layer Deposition of Lithium Niobium Oxides as Potential Solid-State Electrolytes for Lithium-Ion Batteries

2018 ◽  
Vol 10 (2) ◽  
pp. 1654-1661 ◽  
Author(s):  
Biqiong Wang ◽  
Yang Zhao ◽  
Mohammad Norouzi Banis ◽  
Qian Sun ◽  
Keegan R. Adair ◽  
...  
Keyword(s):  
Solid State ◽  
Atomic Layer Deposition ◽  
Lithium Ion Batteries ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Niobium Oxides ◽  
Layer Deposition ◽  
Solid State Electrolytes

scholarly journals Recent progress and future prospects of atomic layer deposition to prepare/modify solid-state electrolytes and interfaces between electrodes for next-generation lithium batteries

2021 ◽  
Author(s):  
Lu Han ◽  
Chien-Te Hsieh ◽  
Bikash Chandra Mallick ◽  
Jianlin Li ◽  
Yasser Ashraf Gandomi
Keyword(s):  
Solid State ◽  
Atomic Layer Deposition ◽  
Lithium Batteries ◽  
Room Temperature ◽  
Recent Progress ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Future Prospects ◽  
Layer Deposition ◽  
Solid State Electrolytes

Comparison of ionic conductivity (at room temperature) of different solid-state electrolytes (SSEs) prepared by the atomic layer deposition (ALD) for lithium-ion batteries (LIBs).

Plasma Enhanced Atomic Layer Deposition of Nickel and Cobalt Phosphate for Lithium Ion Batteries

2022 ◽  
Author(s):  
Lowie Henderick ◽  
Ruben Blomme ◽  
Matthias Marcus Minjauw ◽  
Jonas Keukelier ◽  
Johan Meersschaut ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Substrate Temperature ◽  
Lithium Ion Batteries ◽  
Oxygen Plasma ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Nickel Phosphate ◽  
Cobalt Phosphate

A plasma-enhanced ALD process has been developed to deposit nickel phosphate. The process combines a trimethylphosphate (TMP) plasma with an oxygen plasma and nickelocene at a substrate temperature of 300°C....

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