Hierarchical Micro- and Nanoscale Structures on Surfaces Produced Using a One-Step Pattern Transfer Process

2011 ◽  
Vol 2 (4) ◽  
pp. 289-294 ◽  
Author(s):  
Jie-Ren Li ◽  
Nai-Ning Yin ◽  
Gang-yu Liu
Keyword(s):  
Transfer Process ◽  
Pattern Transfer ◽  
Nanoscale Structures ◽  
One Step

Dynamic Maskless Holographic Lithography

2007 ◽  
Author(s):  
Nathan J. Jenness ◽  
Kurt D. Wulff ◽  
Matthew S. Johannes ◽  
Daniel G. Cole ◽  
Robert L. Clark
Keyword(s):  
Cell Patterning ◽  
Pattern Transfer ◽  
Holographic Lithography ◽  
Single Shot ◽  
Recent Application ◽  
Nanoscale Structures ◽  
Maskless Patterning ◽  
Phase Holograms

Maskless patterning techniques are increasingly implemented in semiconductor research and manufacturing eliminating the need for costly masks or masters. Recent application of these techniques to DNA and cell patterning demonstrates the adaptability of maskless processes. In this paper we present a new lithographic process for dynamically reconfiguring and arbitrarily positioning computer-generated patterns through the use of phase holograms. Similar to current maskless patterning methods this process can achieve pattern transfer through serially tracing an image onto a substrate. The novelty of our process, however, lies in the ability to rapidly fabricate complex micro/nanoscale structures through single-shot exposure of a substrate.

Hierarchical Nanoparticle Assemblies Formed via One-Step Catalytic Stamp Pattern Transfer

2019 ◽  
Vol 11 (4) ◽  
pp. 4667-4677 ◽  
Author(s):  
Tzu-Yi Hung ◽  
Jessica An-Chieh Liu ◽  
Wen-Hsiu Lee ◽  
Jie-Ren Li
Keyword(s):  
Pattern Transfer ◽  
Nanoparticle Assemblies ◽  
One Step

Realization of high-performance tri-layer graphene saturable absorber mirror fabricated via a one-step transfer process

2020 ◽  
Vol 41 (1) ◽  
pp. 012302 ◽  
Author(s):  
Cheng Jiang ◽  
Xu Wang ◽  
Jian Liu ◽  
Jiqiang Ning ◽  
Changcheng Zheng ◽  
...  
Keyword(s):  
Saturable Absorber ◽  
Transfer Process ◽  
High Performance ◽  
Layer Graphene ◽  
Graphene Saturable Absorber ◽  
One Step

A High Energy Rechargeable Battery Based on a One-Step Successive Two-Electron Transfer Process

2005 ◽  
Vol 8 (8) ◽  
pp. A382 ◽  
Author(s):  
Kentarou Nishi ◽  
Toyohiko Nishiumi ◽  
Masayoshi Higuchi ◽  
Kimihisa Yamamoto
Keyword(s):  
Electron Transfer ◽  
Transfer Process ◽  
High Energy ◽  
Rechargeable Battery ◽  
Electron Transfer Process ◽  
One Step

A novel pattern transfer process for bonded SOI giga-bit DRAMs

2002 ◽  
Author(s):  
B.H. Lee ◽  
G.J. Bae ◽  
K.W. Lee ◽  
G. Cha ◽  
W.D. Kim ◽  
...  
Keyword(s):  
Transfer Process ◽  
Pattern Transfer

Development of a robust reverse tone pattern transfer process

2017 ◽  
Author(s):  
Niyaz Khusnatdinov ◽  
Gary Doyle ◽  
Douglas J. Resnick ◽  
Zhengmao Ye ◽  
Dwayne LaBrake ◽  
...  
Keyword(s):  
Transfer Process ◽  
Pattern Transfer ◽  
Tone Pattern

Application of Organic Silicon Clusters to Pattern Transfer Process for Deep UV Lithography

2000 ◽  
Vol 39 (Part 1, No. 12B) ◽  
pp. 6781-6785 ◽  
Author(s):  
Yasuhiko Sato ◽  
Eishi Shiobara ◽  
Junko Abe ◽  
Yasunobu Onishi ◽  
Sawako Yoshikawa ◽  
...  
Keyword(s):  
Transfer Process ◽  
Pattern Transfer ◽  
Silicon Clusters ◽  
Organic Silicon ◽  
Uv Lithography ◽  
Deep Uv
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