Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting

ACS Nano ◽  
2009 ◽  
Vol 3 (8) ◽  
pp. 2304-2310 ◽  
Author(s):  
Se Hyun Ahn ◽  
L. Jay Guo
Keyword(s):  
High Throughput ◽  
Nanoimprint Lithography ◽  
Large Area ◽  
Roll To Roll

Inkjetable and photo-curable resists for large-area and high-throughput roll-to-roll nanoimprint lithography

2014 ◽  
Vol 13 (4) ◽  
pp. 043003 ◽  
Author(s):  
Manuel W. Thesen ◽  
Dieter Nees ◽  
Stephan Ruttloff ◽  
Maximilian Rumler ◽  
Mathias Rommel ◽  
...  
Keyword(s):  
High Throughput ◽  
Nanoimprint Lithography ◽  
Large Area ◽  
Roll To Roll

scholarly journals Uniform Pressing Mechanism in Large-Area Roll-to-Roll Nanoimprint Lithography Process

2021 ◽  
Vol 11 (20) ◽  
pp. 9571
Author(s):  
Ga Eul Kim ◽  
Hyuntae Kim ◽  
Kyoohee Woo ◽  
Yousung Kang ◽  
Seung-Hyun Lee ◽  
...  
Keyword(s):  
Contact Pressure ◽  
Nanoimprint Lithography ◽  
Applied Pressure ◽  
Machine Learning Techniques ◽  
Conventional System ◽  
Large Area ◽  
High Productivity ◽  
Roll To Roll ◽  
Learning Techniques ◽  
Roller Machine

We aimed to increase the processing area of the roll-to-roll (R2R) nanoimprint lithography (NIL) process for high productivity, using a long roller. It is common for a long roller to have bending deformation, geometric errors and misalignment. This causes the non-uniformity of contact pressure between the rollers, which leads to defects such as non-uniform patterning. The non-uniformity of the contact pressure of the conventional R2R NIL system was investigated through finite element (FE) analysis and experiments in the conventional system. To solve the problem, a new large-area R2R NIL uniform pressing system with five multi-backup rollers was proposed and manufactured instead of the conventional system. As a preliminary experiment, the possibility of uniform contact pressure was confirmed by using only the pressure at both ends and one backup roller in the center. A more even contact pressure was achieved by using all five backup rollers and applying an appropriate pushing force to each backup roller. Machine learning techniques were applied to find the optimal combination of the pushing forces. In the conventional pressing process, it was confirmed that pressure deviation of the contact area occurred at a level of 44%; when the improved system was applied, pressure deviation dropped to 5%.

scholarly journals High-throughput roll-to-roll production of polymer biochips for multiplexed DNA detection in point-of-care diagnostics

Lab on a Chip ◽  
2020 ◽  
Vol 20 (22) ◽  
pp. 4106-4117
Author(s):  
Pelin Toren ◽  
Martin Smolka ◽  
Anja Haase ◽  
Ursula Palfinger ◽  
Dieter Nees ◽  
...  
Keyword(s):  
High Throughput ◽  
Nanoimprint Lithography ◽  
Dna Detection ◽  
Point Of Care ◽  
Roll To Roll ◽  
Flexible Polymer ◽  
Nano Structures ◽  
Point Of Care Diagnostics ◽  
Polymer Foils

Roll-to-roll UV nanoimprint lithography has superior advantages for high-throughput manufacturing of micro- or nano-structures on flexible polymer foils with various geometries and configurations.

OLED Manufacturing on Flexible Substrates Towards Roll-to-Roll

MRS Advances ◽  
2019 ◽  
Vol 4 (24) ◽  
pp. 1367-1375 ◽  
Author(s):  
Dongxiang Wang ◽  
Jacqueline Hauptmann ◽  
Christian May
Keyword(s):  
High Throughput ◽  
Present Status ◽  
Manufacturing Cost ◽  
Flexible Substrates ◽  
Large Area ◽  
Thin Glass ◽  
Production Capability ◽  
Roll To Roll ◽  
Pet Film

ABSTRACTLarge area lighting OLEDs manufactured in a Roll-to-Roll (R2R) fashion enable the well-longed production capability with considerably high throughput based on flexible substrates, hence largely reduced OLED manufacturing cost. This paper will outline the present status of R2R OLED fabrication on ultra-thin glass with the focus on transparent OLED devices and how to perform segmentation by printing of silver- and dielectric pastes. Ultra-thin glass (UTG) is laminated on a PET film to avoid fabrication interruptions when glass cracks occur during the Roll-to-Roll process. The R2R fabricated flexible OLEDs also show key-values comparable to conventional OLEDs fabricated on small rigid glass in lab-scale.

scholarly journals UV-nanoimprint lithography and large area roll-to-roll texturization with hyperbranched polymer nanocomposites for light-trapping applications

2012 ◽  
Vol 103 ◽  
pp. 147-156 ◽  
Author(s):  
Marina A. González Lazo ◽  
Rémy Teuscher ◽  
Yves Leterrier ◽  
Jan-Anders E. Månson ◽  
Caroline Calderone ◽  
...  
Keyword(s):  
Polymer Nanocomposites ◽  
Nanoimprint Lithography ◽  
Hyperbranched Polymer ◽  
Light Trapping ◽  
Large Area ◽  
Roll To Roll

Photo-curable resists for inkjet dispensing applied in large area and high throughput roll-to-roll nanoimprint processes

2014 ◽  
Vol 123 ◽  
pp. 121-125 ◽  
Author(s):  
M.W. Thesen ◽  
S. Ruttloff ◽  
R.P.F. Limberg ◽  
M. Vogler ◽  
D. Nees ◽  
...  
Keyword(s):  
High Throughput ◽  
Large Area ◽  
Roll To Roll

Hologram Images Patterned in Shrink BOPP Film by Large-Area Roller Nanoimprint Lithography

2013 ◽  
Vol 873 ◽  
pp. 503-506 ◽  
Author(s):  
Meng Lin Jiang ◽  
Shi Wei Lin ◽  
Wen Kai Jiang
Keyword(s):  
Formation Mechanism ◽  
High Throughput ◽  
Nanoimprint Lithography ◽  
Low Cost ◽  
Nanometer Scale ◽  
Flexible Substrates ◽  
Large Area ◽  
Biaxially Oriented Polypropylene ◽  
Oriented Polypropylene ◽  
Lithography Technique

Thermal roller nanoimprint lithography with the ability of larger area micro-to nanometer-scale patterning on flexible substrates possesses the advantages of low cost and high throughput, and is widely being practiced in industry. Hologram images have been successfully embossed in shrink biaxially oriented polypropylene films by the large-area roller nanoimprint lithography technique. The defects which occur during embossing processes have been studied in order to identify the underlying formation mechanism.

scholarly journals High Throughput Roll-to-Roll Production of Microfluidic Chips

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 1054
Author(s):  
Martin Smolka ◽  
Stephan Ruttloff ◽  
Dieter Nees ◽  
Christine Prietl ◽  
Valentin Satzinger ◽  
...  
Keyword(s):  
High Throughput ◽  
Inorganic Ions ◽  
Soil Nutrient ◽  
Microfluidic Chips ◽  
Large Area ◽  
Nutrient Analysis ◽  
Roll To Roll ◽  
Large Numbers ◽  
Set Up

A high throughput manufacturing process of microfluidic chips based on Roll-to-Roll imprinting is presented. With this procedure, microfluidic patterns can be produced on large area polymer substrates. The subsequent steps of inlet drilling, bonding and electrode printing are set-up on large area processes, too. Overall, this strategy allows highly parallelized processing of large numbers of chips—all costly steps of individual chip handling are avoided. The chips were used for the characterization of inorganic ions for soil nutrient analysis.

scholarly journals Towards high-throughput large-area metalens fabrication using UV-nanoimprint lithography and Bosch deep reactive ion etching

2020 ◽  
Vol 28 (10) ◽  
pp. 15542 ◽  
Author(s):  
Christopher A. Dirdal ◽  
Geir Uri Jensen ◽  
Hallvard Angelskår ◽  
Paul Conrad Vaagen Thrane ◽  
Jo Gjessing ◽  
...  
Keyword(s):  
High Throughput ◽  
Nanoimprint Lithography ◽  
Reactive Ion Etching ◽  
Large Area ◽  
Ion Etching ◽  
Deep Reactive Ion Etching
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