Chemical vapor deposition of diamond on an adamantane-coated sapphire substrate

RSC Advances ◽  
2014 ◽  
Vol 4 (36) ◽  
pp. 18945-18950 ◽  
Author(s):  
Yi-Chun Chen ◽  
Li Chang
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Sapphire Substrate ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Dip Coating ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Sapphire Substrates

Continuous diamond thin films can be grown on sapphire substrates by microwave plasma chemical vapor deposition utilizing a pretreatment of adamantane dip coating on the substrate for enhanced nucleation.

Crystalline carbon nitride thin films deposited by microwave plasma chemical vapor deposition

2000 ◽  
Vol 9 (7) ◽  
pp. 545-549
Author(s):  
Zhang Yong-ping ◽  
Gu You-song ◽  
Chang Xiang-rong ◽  
Tian Zhong-zhuo ◽  
Shi Dong-xia ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Carbon Nitride ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition

Microwave plasma chemical vapor deposition of graphitic carbon thin films

Carbon ◽  
2010 ◽  
Vol 48 (5) ◽  
pp. 1552-1557 ◽  
Author(s):  
Marek Marcinek ◽  
Laurence J. Hardwick ◽  
Grażyna Z. Żukowska ◽  
Robert Kostecki
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Graphitic Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Carbon Thin Films
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