Controlled solvent vapor annealing of a high χ block copolymer thin film
2017 ◽
Vol 19
(4)
◽
pp. 2805-2815
◽
Keyword(s):
Wafer scale high χ block copolymer patterning via dynamic solvent vapor annealing.
2017 ◽
Vol 55
(15)
◽
pp. 1125-1130
◽
Keyword(s):
Keyword(s):
Keyword(s):
2015 ◽
Vol 25
(20)
◽
pp. 3057-3065
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):