Polystyrene core–silica shell composite particles: effect of mesoporous shell structures on oxide CMP and mechanical stability
Keyword(s):
Organic/inorganic composite particles with a core–shell structure exhibit potential applications in chemical mechanical polishing/planarization (CMP) for mechanically challenging materials (copper and low-k dielectrics etc.).
1998 ◽
Vol 35
(2)
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pp. 249-260
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2017 ◽
Vol 10
(05)
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pp. 1750056
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2017 ◽
Vol 528
(1-2)
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pp. 637-645
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1998 ◽
Vol 69
(11)
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pp. 2291-2302
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2007 ◽
Vol 14
(01)
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pp. 117-122
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2006 ◽
Vol 60
(9-10)
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pp. 1219-1223
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