Cobalt and manganese carboxylates for metal oxide thin film deposition by applying the atmospheric pressure combustion chemical vapour deposition process
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Complexes [M(O2CCH2OC2H4OMe)2] (M = Co, Mn) were synthesized characterised regarding their thermal behaviour. They were used as precursors for deposition of rough Co3O4and smooth Mn2O3/Mn3O4thin filmsviathe CCVD process.
2021 ◽
Vol 9
(VI)
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pp. 5215-5232
2016 ◽
Vol 4
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pp. 1600610
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2007 ◽
Vol 202
(3)
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pp. 453-459
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2015 ◽
Vol 06
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pp. 68-77
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2007 ◽
Vol 46
(12)
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pp. 7852-7854
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