Scalable fabrication of flexible piezoresistive pressure sensors based on occluded microstructures for subtle pressure and force waveform detection

2020 ◽  
Vol 8 (47) ◽  
pp. 16774-16783
Author(s):  
Wu-Di Li ◽  
Jun-Hong Pu ◽  
Xing Zhao ◽  
Jin Jia ◽  
Kai Ke ◽  
...  
Keyword(s):  
Manufacturing Process ◽  
Low Cost ◽  
Pressure Sensors ◽  
Piezoresistive Pressure Sensors ◽  
Waveform Detection

Scalable fabrication of flexible PDMS/CNS pressure sensors with occluded microstructures were achieved by a simple, low-cost and eco-friendly manufacturing process.

Ultrasensitive, flexible, and low-cost nanoporous piezoresistive composites for tactile pressure sensing

Nanoscale ◽  
2019 ◽  
Vol 11 (6) ◽  
pp. 2779-2786 ◽  
Author(s):  
Jing Li ◽  
Santiago Orrego ◽  
Junjie Pan ◽  
Peisheng He ◽  
Sung Hoon Kang
Keyword(s):  
Carbon Nanotube ◽  
Polymer Composites ◽  
Low Cost ◽  
Pressure Sensors ◽  
Nanoporous Carbon ◽  
Pressure Sensing ◽  
Etching Method ◽  
Piezoresistive Pressure Sensors

We report a facile sacrificial casting–etching method to synthesize nanoporous carbon nanotube/polymer composites for ultra-sensitive and low-cost piezoresistive pressure sensors.

scholarly journals Temperature measurement performance of silicon piezoresistive MEMS pressure sensors for industrial applications

2015 ◽  
Vol 28 (1) ◽  
pp. 123-131 ◽  
Author(s):  
Milos Frantlovic ◽  
Ivana Jokic ◽  
Zarko Lazic ◽  
Branko Vukelic ◽  
Marko Obradov ◽  
...  
Keyword(s):  
Temperature Measurement ◽  
Low Cost ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Correction Method ◽  
Industrial Applications ◽  
Sensor Applications ◽  
Piezoresistive Pressure Sensors ◽  
Mems Pressure Sensors

Temperature and pressure are the most common parameters to be measured and monitored not only in industrial processes but in many other fields from vehicles and healthcare to household appliances. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, offering high sensitivity, solid-state reliability and small dimensions at a low cost achieved by mass production. The inherent temperature dependence of the output signal of such sensors adversely affects their pressure measurement performance, necessitating the use of correction methods in a majority of cases. However, the same effect can be utilized for temperature measurement, thus enabling new sensor applications. In this paper we perform characterization of MEMS piezoresistive pressure sensors for temperature measurement, propose a sensor correction method, and demonstrate that the measurement error as low as ? 0.3?C can be achieved.

Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants

2011 ◽  
Vol 254 ◽  
pp. 94-98 ◽  
Author(s):  
Li Shiah Lim ◽  
Woo Tae Park ◽  
Liang Lou ◽  
Han Hua Feng ◽  
Pushpapraj Singh
Keyword(s):  
Pressure Sensor ◽  
Biomedical Applications ◽  
Low Cost ◽  
Silicon Nanowire ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Medical Implants ◽  
Mems Technology ◽  
Piezoresistive Pressure Sensors

Pressure sensors using MEMS technology have been advanced due to their low cost, small size and high sensitivity, which is an advantage for biomedical applications. In this paper,silicon nanowire was proposed to be used as the piezoresistors due to the high sensitivity [1][2].The sensors were designed, and characterized for the use of medical devices for pressure monitoring. The pressure sensor size is 2mm x 2mm with embedded SiNWs of 90nm x150nm been fabricated. Additionally, the sensitivity of 0.0024 Pa-1 pressure sensor has been demonstrated.

Optimized technology for the fabrication of piezoresistive pressure sensors

2000 ◽  
Vol 10 (2) ◽  
pp. 204-208 ◽  
Author(s):  
A Merlos ◽  
J Santander ◽  
M D Alvarez ◽  
F Campabadal
Keyword(s):  
Pressure Sensors ◽  
Piezoresistive Pressure Sensors

scholarly journals Testing an “IoT” Tide Gauge Network for Coastal Monitoring

IoT ◽  
2021 ◽  
Vol 2 (1) ◽  
pp. 17-32
Author(s):  
Philip Knight ◽  
Cai Bird ◽  
Alex Sinclair ◽  
Jonathan Higham ◽  
Andy Plater
Keyword(s):  
Sea Level ◽  
Morphological Changes ◽  
Tide Gauge ◽  
Low Cost ◽  
Pressure Sensors ◽  
Wave Activity ◽  
Tide Gauges ◽  
Coastal Monitoring ◽  
Level Data ◽  
Operational Constraints

A low-cost “Internet of Things” (IoT) tide gauge network was developed to provide real-time and “delayed mode” sea-level data to support monitoring of spatial and temporal coastal morphological changes. It is based on the Arduino Sigfox MKR 1200 micro-controller platform with a Measurement Specialties pressure sensor (MS5837). Experiments at two sites colocated with established tide gauges show that these inexpensive pressure sensors can make accurate sea-level measurements. While these pressure sensors are capable of ~1 cm accuracy, as with other comparable gauges, the effect of significant wave activity can distort the overall sea-level measurements. Various off-the-shelf hardware and software configurations were tested to provide complementary data as part of a localized network and to overcome operational constraints, such as lack of suitable infrastructure for mounting the tide gauges and for exposed beach locations.

Low Cost Manufacturing Process of Y-Channel Active Microfluidic Mixing Device Using 3D Printing Machine

2021 ◽  
Author(s):  
Mohammad Salman Parvez ◽  
Md. Fazlay Rubby ◽  
Shanzida Kabir ◽  
Nazmul Islam
Keyword(s):  
3D Printing ◽  
Manufacturing Process ◽  
Low Cost ◽  
Microfluidic Mixing ◽  
Low Cost Manufacturing ◽  
Printing Machine
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