Ultrasensitive, flexible, and low-cost nanoporous piezoresistive composites for tactile pressure sensing

Nanoscale ◽  
2019 ◽  
Vol 11 (6) ◽  
pp. 2779-2786 ◽  
Author(s):  
Jing Li ◽  
Santiago Orrego ◽  
Junjie Pan ◽  
Peisheng He ◽  
Sung Hoon Kang

We report a facile sacrificial casting–etching method to synthesize nanoporous carbon nanotube/polymer composites for ultra-sensitive and low-cost piezoresistive pressure sensors.

2015 ◽  
Vol 28 (1) ◽  
pp. 123-131 ◽  
Author(s):  
Milos Frantlovic ◽  
Ivana Jokic ◽  
Zarko Lazic ◽  
Branko Vukelic ◽  
Marko Obradov ◽  
...  

Temperature and pressure are the most common parameters to be measured and monitored not only in industrial processes but in many other fields from vehicles and healthcare to household appliances. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, offering high sensitivity, solid-state reliability and small dimensions at a low cost achieved by mass production. The inherent temperature dependence of the output signal of such sensors adversely affects their pressure measurement performance, necessitating the use of correction methods in a majority of cases. However, the same effect can be utilized for temperature measurement, thus enabling new sensor applications. In this paper we perform characterization of MEMS piezoresistive pressure sensors for temperature measurement, propose a sensor correction method, and demonstrate that the measurement error as low as ? 0.3?C can be achieved.


Carbon ◽  
2011 ◽  
Vol 49 (1) ◽  
pp. 106-110 ◽  
Author(s):  
Jihun Hwang ◽  
Jaeyoung Jang ◽  
Kipyo Hong ◽  
Kun Nyun Kim ◽  
Jong Hun Han ◽  
...  

Sensors ◽  
2018 ◽  
Vol 18 (5) ◽  
pp. 1338 ◽  
Author(s):  
Yin He ◽  
Yue Ming ◽  
Wei Li ◽  
Yafang Li ◽  
Maoqi Wu ◽  
...  

ACS Nano ◽  
2015 ◽  
Vol 9 (4) ◽  
pp. 4103-4110 ◽  
Author(s):  
Youngseok Oh ◽  
Mohammad F. Islam

2020 ◽  
Vol 8 (47) ◽  
pp. 16774-16783
Author(s):  
Wu-Di Li ◽  
Jun-Hong Pu ◽  
Xing Zhao ◽  
Jin Jia ◽  
Kai Ke ◽  
...  

Scalable fabrication of flexible PDMS/CNS pressure sensors with occluded microstructures were achieved by a simple, low-cost and eco-friendly manufacturing process.


2011 ◽  
Vol 254 ◽  
pp. 94-98 ◽  
Author(s):  
Li Shiah Lim ◽  
Woo Tae Park ◽  
Liang Lou ◽  
Han Hua Feng ◽  
Pushpapraj Singh

Pressure sensors using MEMS technology have been advanced due to their low cost, small size and high sensitivity, which is an advantage for biomedical applications. In this paper,silicon nanowire was proposed to be used as the piezoresistors due to the high sensitivity [1][2].The sensors were designed, and characterized for the use of medical devices for pressure monitoring. The pressure sensor size is 2mm x 2mm with embedded SiNWs of 90nm x150nm been fabricated. Additionally, the sensitivity of 0.0024 Pa-1 pressure sensor has been demonstrated.


2016 ◽  
Vol 51 (24) ◽  
pp. 11014-11020 ◽  
Author(s):  
Khurram Shehzad ◽  
Tajamal Hussain ◽  
Asma Tufail Shah ◽  
Adnan Mujahid ◽  
Mirza Nadeem Ahmad ◽  
...  

2020 ◽  
Vol 8 (22) ◽  
pp. 4883-4889 ◽  
Author(s):  
Guoqing Zu ◽  
Xiaodong Wang ◽  
Kazuyoshi Kanamori ◽  
Kazuki Nakanishi

We report novel superhydrophobic highly flexible composites based on a doubly cross-linked aerogel and carbon nanotubes for highly sensitive strain/pressure sensing.


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