High quality GaN grown at high growth rates by gas-source molecular beam epitaxy

1995 ◽  
Vol 31 (24) ◽  
pp. 2127-2128 ◽  
Author(s):  
L.K. Li ◽  
Z. Yang ◽  
W.I. Wang
Keyword(s):  
Molecular Beam Epitaxy ◽  
Growth Rates ◽  
Molecular Beam ◽  
High Growth ◽  
High Quality ◽  
Gas Source

High-Quality AlGaN/GaN Grown on Sapphire by Gas-Source Molecular Beam Epitaxy using a Thin Low-Temperature AlN Layer

1999 ◽  
Vol 595 ◽  
Author(s):  
M. J. Jurkovic ◽  
L.K. Li ◽  
B. Turk ◽  
W. I. Wang ◽  
S. Syed ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Low Temperature ◽  
Molecular Beam ◽  
Structural Characteristics ◽  
High Quality ◽  
Gas Source ◽  
Background Doping ◽  
Shubnikov De Haas Oscillations

AbstractGrowth of high-quality AlGaN/GaN heterostructures on sapphire by ammonia gassource molecular beam epitaxy is reported. Incorporation of a thin AlN layer grown at low temperature within the GaN buffer is shown to result in enhanced electrical and structural characteristics for subsequently grown heterostructures. AlGaN/GaN structures exhibiting reduced background doping and enhanced Hall mobilities (2100, 10310 and 12200 cm2/Vs with carrier sheet densities of 6.1 × 1012 cm−2, 6.0 × 1012 cm−2, and 5.8 × 1012 cm−2 at 300 K, 77 K, and 0.3 K, respectively) correlate with dislocation filtering in the thin AlN layer. Magnetotransport measurements at 0.3 K reveal well-resolved Shubnikov-de Haas oscillations starting at 3 T.

High-quality InGaP and InGaP/InAlP multiple quantum well grown by gas-source molecular beam epitaxy

1994 ◽  
Vol 136 (1-4) ◽  
pp. 306-309 ◽  
Author(s):  
Chunhui Yan ◽  
Dianzhao Sun ◽  
Hongxi Guo ◽  
Xiaobing Li ◽  
Shirong Zu ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Quantum Well ◽  
Molecular Beam ◽  
Multiple Quantum Well ◽  
Multiple Quantum ◽  
High Quality ◽  
Gas Source

Control of ion content and nitrogen species using a mixed chemistry plasma for GaN grown at extremely high growth rates >9 μm/h by plasma-assisted molecular beam epitaxy

2015 ◽  
Vol 118 (15) ◽  
pp. 155302 ◽  
Author(s):  
Brendan P. Gunning ◽  
Evan A. Clinton ◽  
Joseph J. Merola ◽  
W. Alan Doolittle ◽  
Rich C. Bresnahan
Keyword(s):  
Molecular Beam Epitaxy ◽  
Growth Rates ◽  
Molecular Beam ◽  
High Growth ◽  
Nitrogen Species ◽  
Ion Content

scholarly journals High Quality AlN and GaN Grown on Si(111) by Gas Source Molecular Beam Epitaxy with Ammonia

2000 ◽  
Vol 5 (S1) ◽  
pp. 467-473 ◽  
Author(s):  
Sergey A. Nikishin ◽  
Nikolai N. Faleev ◽  
Vladimir G. Antipov ◽  
Sebastien Francoeur ◽  
Luis Grave de Peralta ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Hydride Vapor Phase Epitaxy ◽  
Growth Mode ◽  
Subsequent Growth ◽  
High Quality ◽  
Gas Source ◽  
Initial Nucleation ◽  
Rapid Transition ◽  
Gan On Si

We describe the growth of high quality AlN and GaN on Si(111) by gas source molecular beam epitaxy (GSMBE) with ammonia (NH3). The initial nucleation (at 1130−1190K) of an AlN monolayer with full substrate coverage resulted in a very rapid transition to two-dimensional (2D) growth mode of AlN. The rapid transition to the 2D growth mode of AlN is essential for the subsequent growth of high quality GaN, and complete elimination of cracking in thick ( > 2 μm) GaN layers. We show, using Raman scattering (RS) and photoluminescence (PL) measurements, that the tensile stress in the GaN is due to thermal expansion mismatch, is below the ultimate strength of breaking of GaN, and produces a sizable shift in the bandgap. We show that the GSMBE AlN and GaN layers grown on Si can be used as a substrate for subsequent deposition of thick AlN and GaN layers by hydride vapor phase epitaxy (HVPE).

Background pressure dependence of GaAs and AlGaAs growth rates in gas-source molecular beam epitaxy

1991 ◽  
Vol 111 (1-4) ◽  
pp. 544-549 ◽  
Author(s):  
Junji Saito ◽  
Takeshi Maeda ◽  
Katsuji Ono ◽  
Kazuo Kondo
Keyword(s):  
Molecular Beam Epitaxy ◽  
Pressure Dependence ◽  
Growth Rates ◽  
Molecular Beam ◽  
Gas Source

High quality GaN grown on Si(111) by gas source molecular beam epitaxy with ammonia

1999 ◽  
Vol 75 (14) ◽  
pp. 2073-2075 ◽  
Author(s):  
S. A. Nikishin ◽  
N. N. Faleev ◽  
V. G. Antipov ◽  
S. Francoeur ◽  
L. Grave de Peralta ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
High Quality ◽  
Gas Source
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