Influence of particulates generated in a CH4low pressure radiofrequency discharge on dc negative self bias voltage
2000 ◽
Vol 11
(1)
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pp. 71-76
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1991 ◽
Vol 139
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pp. 24-28
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2010 ◽
Vol 28
(2)
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pp. 309-313
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2011 ◽
Vol 02
(09)
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pp. 954-957
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2001 ◽
Vol 13
(18)
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pp. 3969-3976
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2011 ◽
Vol 29
(1)
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pp. 011001
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2007 ◽
Vol 201
(9-11)
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pp. 5043-5045
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Keyword(s):
1994 ◽
Vol 41
(1)
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pp. 57-62
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