Powder‐free plasma chemical vapor deposition of hydrogenated amorphous silicon with high rf power density using modulated rf discharge
1989 ◽
Vol 50
(C5)
◽
pp. C5-667-C5-672
2007 ◽
Vol 154
(5)
◽
pp. G122
◽
2008 ◽
Vol 69
(2-3)
◽
pp. 648-652
◽
1994 ◽
Vol 33
(Part 1, No. 7B)
◽
pp. 4373-4376
◽
2000 ◽
Vol 39
(Part 1, No. 11)
◽
pp. 6404-6409
◽
2001 ◽
Vol 40
(Part 1, No. 12)
◽
pp. 6862-6867
◽
1993 ◽
pp. 345-350
◽