Quantitative two‐dimensional dopant profile measurement and inverse modeling by scanning capacitance microscopy

1995 ◽  
Vol 66 (3) ◽  
pp. 344-346 ◽  
Author(s):  
Y. Huang ◽  
C. C. Williams ◽  
J. Slinkman
Keyword(s):  
Inverse Modeling ◽  
Profile Measurement ◽  
Two Dimensional ◽  
Scanning Capacitance Microscopy ◽  
Dopant Profile

Electron holography study for two-dimensional dopant profile measurement with specimens prepared by backside ion milling

2007 ◽  
Vol 57 (1) ◽  
pp. 13-18 ◽  
Author(s):  
J. H. Yoo ◽  
J.-M. Yang ◽  
S. Ulugbek ◽  
C. W. Ahn ◽  
W.-J. Hwang ◽  
...  
Keyword(s):  
Electron Holography ◽  
Profile Measurement ◽  
Two Dimensional ◽  
Ion Milling ◽  
Dopant Profile

scholarly journals Two-dimensional Dopant Profile Measurements by Scanning Capacitance Microscopy.

Hyomen Kagaku ◽  
1999 ◽  
Vol 20 (1) ◽  
pp. 27-32 ◽  
Author(s):  
Eriko MINEO ◽  
Maki KUBO ◽  
Masatoshi NAKAZAWA ◽  
Aritoshi SUGIMOTO
Keyword(s):  
Two Dimensional ◽  
Scanning Capacitance Microscopy ◽  
Dopant Profile

Two-dimensional density profile measurement with a sheet thermal Li beam on CPD

2007 ◽  
Vol 363-365 ◽  
pp. 1429-1435 ◽  
Author(s):  
H. Zushi ◽  
T. Morisaki ◽  
Y. Inada ◽  
J. Bouchard ◽  
K. Nakashima ◽  
...  
Keyword(s):  
Density Profile ◽  
Profile Measurement ◽  
Two Dimensional
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