Quantitative measurement of two-dimensional dopant profile by cross-sectional scanning capacitance microscopy

Author(s):  
J. S. McMurray
Hyomen Kagaku ◽  
1999 ◽  
Vol 20 (1) ◽  
pp. 27-32 ◽  
Author(s):  
Eriko MINEO ◽  
Maki KUBO ◽  
Masatoshi NAKAZAWA ◽  
Aritoshi SUGIMOTO

Author(s):  
J.S. McMurray ◽  
C.M. Molella

Abstract Root cause for failure of 90 nm body contacted nFETs was identified using scanning capacitance microscopy (SCM) and scanning spreading resistance microscopy (SSRM). The failure mechanism was identified using both cross sectional imaging and imaging of the active silicon - buried oxide (BOX) interface in plan view. This is the first report of back-side plan view SCM and SSRM data for SOI devices. This unique plan view shows the root cause for the failure is an under doped link up region between the body contacts and the active channel of the device.


2018 ◽  
Vol 21 (3) ◽  
pp. 134-137
Author(s):  
Yong Cheol Jun ◽  
Young Lae Moon ◽  
Moustafa I Elsayed ◽  
Jae Hwan Lim ◽  
Dong Hyuk Cha

BACKGROUND: In a previous study undertaken to quantify capsular volume in rotator cuff interval or axillary pouch, significant differences were found between controls and patients with instability. However, the results obtained were derived from two-dimensional cross sectional areas. In our study, we sought correlation between three-dimensional (3D) capsular volumes, as measured by magnetic resonance arthrography (MRA), and multidirectional instability (MDI) of the shoulder.METHODS: The MRAs of 21 patients with MDI of the shoulder and 16 control cases with no instability were retrospectively reviewed. Capsular areas determined by MRA were translated into 3D volumes using 3D software Mimics ver. 16 (Materilise, Leuven, Belgium), and glenoid surface area was measured in axial and coronal MRA views. Then, the ratio between capsular volume and glenoid surface area was calculated, and evaluated with control group.RESULTS: The ratio between 3D capsular volume and glenoid surface area was significantly increased in the MDI group (3.59 ± 0.83 cm³/cm²) compared to the control group (2.53 ± 0.62 cm³/cm²) (p < 0.01).CONCLUSIONS: From these results, we could support that capsular volume enlargement play an important role in MDI of the shoulder using volume measurement.


2011 ◽  
Vol 28 (8) ◽  
pp. 899-906 ◽  
Author(s):  
Satoshi Yuda ◽  
Reiko Kaneko ◽  
Atsuko Muranaka ◽  
Akiyoshi Hashimoto ◽  
Kazufumi Tsuchihashi ◽  
...  

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