Quantitative ultra shallow dopant profile measurement by scanning capacitance microscopy

2018 ◽  
pp. 519-522
Author(s):  
Yoshio Kikuchi ◽  
Tomohiro Kubo ◽  
Masataka Kase
Keyword(s):  
Profile Measurement ◽  
Scanning Capacitance Microscopy ◽  
Dopant Profile

Dopant profile measurements in ion implanted 6H–SiC by scanning capacitance microscopy

2001 ◽  
Vol 184 (1-4) ◽  
pp. 183-189 ◽  
Author(s):  
F. Giannazzo ◽  
L. Calcagno ◽  
F. Roccaforte ◽  
P. Musumeci ◽  
F. La Via ◽  
...  
Keyword(s):  
Scanning Capacitance Microscopy ◽  
Dopant Profile ◽  
Ion Implanted

Electron holography study for two-dimensional dopant profile measurement with specimens prepared by backside ion milling

2007 ◽  
Vol 57 (1) ◽  
pp. 13-18 ◽  
Author(s):  
J. H. Yoo ◽  
J.-M. Yang ◽  
S. Ulugbek ◽  
C. W. Ahn ◽  
W.-J. Hwang ◽  
...  
Keyword(s):  
Electron Holography ◽  
Profile Measurement ◽  
Two Dimensional ◽  
Ion Milling ◽  
Dopant Profile
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