Smooth wet etching by ultraviolet-assisted photoetching and its application to the fabrication of AlGaN/GaN heterostructure field-effect transistors

Applied Physics Letters ◽

10.1063/1.1330226 ◽

2000 ◽

Vol 77 (23) ◽

pp. 3833-3835 ◽

Author(s):

H. Maher ◽

D. W. DiSanto ◽

G. Soerensen ◽

C. R. Bolognesi ◽

H. Tang ◽

...

Keyword(s):

Field Effect ◽

Field Effect Transistors ◽

Wet Etching ◽

Heterostructure Field Effect Transistors ◽

Gan Heterostructure

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Effect of Gan interlayer thickness on the Algan/Gan heterostructure field-effect transistors for self-terminated wet etching process

2016 13th China International Forum on Solid State Lighting: International Forum on Wide Bandgap Semiconductors China (SSLChina: IFWS) ◽

10.1109/ifws.2016.7803759 ◽

2016 ◽

Author(s):

Liuan Li ◽

Liang He ◽

Fan Yang ◽

Zijun Chen ◽

Xiaorong Zhang ◽

...

Keyword(s):

Field Effect ◽

Field Effect Transistors ◽

Wet Etching ◽

Etching Process ◽

Interlayer Thickness ◽

Heterostructure Field Effect Transistors ◽

Gan Heterostructure

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Self-heating and the temperature dependence of the dc characteristics of GaN heterostructure field effect transistors

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2172921 ◽

2006 ◽

Vol 24 (3) ◽

pp. 624-628 ◽

Author(s):

S. P. McAlister ◽

J. A. Bardwell ◽

S. Haffouz ◽

H. Tang

Keyword(s):

Temperature Dependence ◽

Field Effect ◽

Field Effect Transistors ◽

Self Heating ◽

Dc Characteristics ◽

Heterostructure Field Effect Transistors ◽

Gan Heterostructure

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Simulation of the effect of polarization Coulomb field scattering on device linearity in AlGaN/GaN heterostructure field effect transistors using the Monte Carlo method

AIP Advances ◽

10.1063/5.0056337 ◽

2021 ◽

Vol 11 (8) ◽

pp. 085204

Author(s):

Yongxiong Yang ◽

Zhaojun Lin ◽

Mingyan Wang ◽

Heng Zhou ◽

Yang Liu ◽

...

Keyword(s):

Monte Carlo ◽

Monte Carlo Method ◽

Field Effect ◽

Field Effect Transistors ◽

Coulomb Field ◽

The Monte Carlo Method ◽

Polarization Coulomb Field Scattering ◽

Heterostructure Field Effect Transistors ◽

Gan Heterostructure

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Polarization Coulomb field scattering with the electron systems in AlGaN/GaN heterostructure field-effect transistors

AIP Advances ◽

10.1063/5.0012615 ◽

2020 ◽

Vol 10 (7) ◽

pp. 075212

Author(s):

Guangyuan Jiang ◽

Yuanjie Lv ◽

Zhaojun Lin ◽

Yongxiong Yang ◽

Yang Liu ◽

...

Keyword(s):

Field Effect ◽

Field Effect Transistors ◽

Coulomb Field ◽

Electron Systems ◽

Polarization Coulomb Field Scattering ◽

Heterostructure Field Effect Transistors ◽

Gan Heterostructure

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Impact of dopants in GaN on the formation of two-dimensional electron gas in AlGaN/GaN heterostructure field-effect transistors

Applied Physics A ◽

10.1007/s003390100978 ◽

2002 ◽

Vol 75 (3) ◽

pp. 387-389 ◽

Author(s):

R.M. Chu ◽

Y.D. Zheng ◽

Y.G. Zhou ◽

P. Han ◽

B. Shen ◽

...

Keyword(s):

Field Effect ◽

Field Effect Transistors ◽

Electron Gas ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Heterostructure Field Effect Transistors ◽

Dimensional Electron Gas ◽

Gan Heterostructure

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Theoretical model of the polarization Coulomb field scattering in strained AlGaN/AlN/GaN heterostructure field-effect transistors

Journal of Applied Physics ◽

10.1063/1.4891258 ◽

2014 ◽

Vol 116 (4) ◽

pp. 044507 ◽

Author(s):

Chongbiao Luan ◽

Zhaojun Lin ◽

Yuanjie Lv ◽

Jingtao Zhao ◽

Yutang Wang ◽

...

Keyword(s):

Theoretical Model ◽

Field Effect ◽

Field Effect Transistors ◽

Coulomb Field ◽

Polarization Coulomb Field Scattering ◽

Heterostructure Field Effect Transistors ◽

Gan Heterostructure

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Residual strain in recessed AlGaN/GaN heterostructure field-effect transistors evaluated by micro photoluminescence measurements

physica status solidi (c) ◽

10.1002/pssc.201100408 ◽

2012 ◽

Vol 9 (3-4) ◽

pp. 911-914 ◽

Author(s):

Martin Mikulics ◽

Hilde Hardtdegen ◽

Andreas Winden ◽

Alfred Fox ◽

Michel Marso ◽

...

Keyword(s):

Residual Strain ◽

Field Effect ◽

Field Effect Transistors ◽

Heterostructure Field Effect Transistors ◽

Gan Heterostructure

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Surface barrier height for different Al compositions and barrier layer thicknesses in AlGaN/GaN heterostructure field effect transistors

10.1063/1.4848451 ◽

2013 ◽

Author(s):

Nitin Goyal ◽

Benjamin Iniguez ◽

Tor A. Fjeldly

Keyword(s):

Barrier Height ◽

Barrier Layer ◽

Field Effect ◽

Field Effect Transistors ◽

Surface Barrier ◽

Heterostructure Field Effect Transistors ◽

Gan Heterostructure

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Anomalous behavior of AlGaN∕GaN heterostructure field-effect transistors at cryogenic temperatures: From current collapse to current enhancement with cooling

Applied Physics Letters ◽

10.1063/1.2715032 ◽

2007 ◽

Vol 90 (12) ◽

pp. 123505 ◽

Author(s):

H. F. Sun ◽

C. R. Bolognesi

Keyword(s):

Field Effect ◽

Field Effect Transistors ◽

Anomalous Behavior ◽

Cryogenic Temperatures ◽

Current Collapse ◽

Heterostructure Field Effect Transistors ◽

Gan Heterostructure

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Polarization effects, surface states, and the source of electrons in AlGaN/GaN heterostructure field effect transistors

Applied Physics Letters ◽

10.1063/1.126940 ◽

2000 ◽

Vol 77 (2) ◽

pp. 250-252 ◽

Author(s):

J. P. Ibbetson ◽

P. T. Fini ◽

K. D. Ness ◽

S. P. DenBaars ◽

J. S. Speck ◽

...

Keyword(s):

Field Effect ◽

Field Effect Transistors ◽

Surface States ◽

Polarization Effects ◽

Heterostructure Field Effect Transistors ◽

Gan Heterostructure

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