scholarly journals Ferroelectric and microstructural characteristics of SrBi2Ta2O9 thin films crystallized by the rapid thermal annealing process

2001 ◽  
Vol 89 (6) ◽  
pp. 3416-3419 ◽  
Author(s):  
S. M. Zanetti ◽  
P. R. Bueno ◽  
E. Leite ◽  
E. Longo ◽  
J. A. Varela
Keyword(s):  
Thin Films ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Annealing Process ◽  
Rapid Thermal Annealing Process ◽  
Microstructural Characteristics ◽  
Thermal Annealing Process

Fabrication of Cu(In,Ga)Se2 Thin Films from Nanoparticles by Non-Vacuum Mechanochemical Method and Rapid Thermal Annealing Process

2012 ◽  
Vol 1 (2) ◽  
pp. P26-P28 ◽  
Author(s):  
Y. Liu ◽  
D. Kong ◽  
H. You ◽  
C. Zhao ◽  
J. Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Annealing Process ◽  
Mechanochemical Method ◽  
Rapid Thermal Annealing Process ◽  
Thermal Annealing Process

Electrical properties of MOCVD BST thin films annealed by rapid thermal annealing process

2001 ◽  
Vol 33 (1-4) ◽  
pp. 291-301 ◽  
Author(s):  
Deok-sin Kil ◽  
Jong-beom Park ◽  
Jun-sik Lee ◽  
Jong-woo Yoon ◽  
Yong-sik Yu ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Annealing Process ◽  
Rapid Thermal Annealing Process ◽  
Bst Thin Films ◽  
Thermal Annealing Process

scholarly journals Analysis of the eight parameter variation of the resonant tunneling diode (RTD) in the rapid thermal annealing process with resistance compensation effect

AIP Advances ◽  
2020 ◽  
Vol 10 (3) ◽  
pp. 035103
Author(s):  
Fan Zhao ◽  
Yidian Wang ◽  
Weilian Guo ◽  
Jia Cong ◽  
Clarence Augustine T. H. Tee ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Resonant Tunneling ◽  
Compensation Effect ◽  
Parameter Variation ◽  
Resonant Tunneling Diode ◽  
Annealing Process ◽  
Rapid Thermal Annealing Process ◽  
Tunneling Diode ◽  
Thermal Annealing Process

Structural and photoluminescence characteristics of ZnO films by room temperature sputtering and rapid thermal annealing process

2006 ◽  
Vol 84 (3) ◽  
pp. 345-349 ◽  
Author(s):  
P.-T. Hsieh ◽  
Y.-C. Chen ◽  
C.-M. Wang ◽  
Y.-Z. Tsai ◽  
C.-C. Hu
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Room Temperature ◽  
Annealing Process ◽  
Zno Films ◽  
Rapid Thermal Annealing Process ◽  
Thermal Annealing Process

Characteristics-improvement of QD semiconductor optical amplifier using rapid-thermal annealing process

2018 ◽  
Author(s):  
Duangrudee Worasucheep ◽  
Atsushi Matsumoto ◽  
Kouichi Akahane ◽  
Naokatsu Yamamoto ◽  
Naoya Wada ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Semiconductor Optical Amplifier ◽  
Optical Amplifier ◽  
Annealing Process ◽  
Rapid Thermal Annealing Process ◽  
Thermal Annealing Process

Hydrogen Behavior in PECVD Nitride by SiH4 & ND3 During RTA

1996 ◽  
Vol 424 ◽  
Author(s):  
S. S. He ◽  
V. L. Shannon ◽  
T. Nguyen
Keyword(s):  
Silicon Nitride ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Annealing Process ◽  
Rapid Thermal Annealing Process ◽  
Wave Numbers ◽  
Thermal Annealing Process

AbstractPECVD silicon nitride was deposited by silane and deuterium ammonia. Silicon rich and nitrogen rich silicon nitride were deposited by varying the ratio of the SiH4/DH3. From FTIR, we found that the wave numbers of SiD and ND shifted lower when compared to SiH and NH bond in the NH3 nitride. In Si-rich nitride, both Si-H and Si-D bonds were found, which is different from N-rich nitride, where only an ND bond was found. Most of the hydrogen in NH(D) comes from the ammonia during PECVD deposition. We found that some of the deuterium exchanges its bonding to silicon from the initial bonding to nitrogen during a rapid thermal annealing process.

Properties of polysilicon films annealed by a rapid thermal annealing process

1992 ◽  
Vol 220 (1-2) ◽  
pp. 106-110 ◽  
Author(s):  
Lj. Ristic ◽  
M.L. Kniffin ◽  
R. Gutteridge ◽  
H.G. Hughes
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Annealing Process ◽  
Rapid Thermal Annealing Process ◽  
Polysilicon Films ◽  
Thermal Annealing Process
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