Material and electrical characterization of carbon-doped Ta[sub 2]O[sub 5] films for embedded dynamic random access memory applications

2002 ◽  
Vol 91 (1) ◽  
pp. 308 ◽  
Author(s):  
K. Chu ◽  
J. P. Chang ◽  
M. L. Steigerwald ◽  
R. M. Fleming ◽  
R. L. Opila ◽  
...  
Keyword(s):  
Random Access ◽  
Electrical Characterization ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Access Memory ◽  
Carbon Doped ◽  
Memory Applications

Deposition and Electrical Characterization of Very ThinSrTiO3Films for Ultra Large Scale Integrated Dynamic Random Access Memory Application

1995 ◽  
Vol 34 (Part 1, No. 9B) ◽  
pp. 5178-5183 ◽  
Author(s):  
Cheol Seong Hwang ◽  
Soon Oh Park ◽  
Chang Seok Kang ◽  
Hag-Ju Cho ◽  
Ho-Kyu Kang ◽  
...  
Keyword(s):  
Large Scale ◽  
Random Access ◽  
Electrical Characterization ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Access Memory

Reliability and Characterization of Composite Oxide/Nitride Dielectrics for Multi‐Megabit Dynamic Random Access Memory Stacked Capacitors

1991 ◽  
Vol 138 (7) ◽  
pp. 2052-2057 ◽  
Author(s):  
P. C. Fazan ◽  
A. Ditali ◽  
C. H. Dennison ◽  
H. E. Rhodes ◽  
H. C. Chan ◽  
...  
Keyword(s):  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Access Memory ◽  
Composite Oxide

Effects of Post-Annealing on the Conduction Properties ofPt/(Ba,Sr)TiO3/PtCapacitors for Dynamic Random Access Memory Applications

1997 ◽  
Vol 36 (Part 1, No. 7A) ◽  
pp. 4382-4385 ◽  
Author(s):  
Jae-Hyun Joo ◽  
Yoo-Chan Jeon ◽  
Jeong-Min Seon ◽  
Ki-Young Oh ◽  
Jae-Sung Roh ◽  
...  
Keyword(s):  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Access Memory ◽  
Post Annealing ◽  
Memory Applications ◽  
Conduction Properties

Thermal Stability of Co-Sputtered Ru-Ti Alloy Electrodes for Dynamic Random Access Memory Applications

1998 ◽  
Vol 37 (Part 2, No. 10B) ◽  
pp. L1247-L1250 ◽  
Author(s):  
Ray-Hua Horng ◽  
Dong-Sing Wuu ◽  
Luh-Huei Wu ◽  
Ming-Kwei Lee ◽  
Shih-Hsiung Chan ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Ti Alloy ◽  
Access Memory ◽  
Memory Applications ◽  
Thermal Stability Of

(Ba,Sr)TiO3 thin films with conducting perovskite electrodes for dynamic random access memory applications

1999 ◽  
Vol 74 (21) ◽  
pp. 3194-3196 ◽  
Author(s):  
B. Nagaraj ◽  
T. Sawhney ◽  
S. Perusse ◽  
S. Aggarwal ◽  
R. Ramesh ◽  
...  
Keyword(s):  
Thin Films ◽  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Access Memory ◽  
Memory Applications
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