Reliability and Characterization of Composite Oxide/Nitride Dielectrics for Multi‐Megabit Dynamic Random Access Memory Stacked Capacitors
1991 ◽
Vol 138
(7)
◽
pp. 2052-2057
◽
Keyword(s):
1995 ◽
Vol 34
(Part 1, No. 9B)
◽
pp. 5178-5183
◽
Keyword(s):
2011 ◽
Vol 58
(9)
◽
pp. 2952-2958
◽
Keyword(s):
Keyword(s):
Keyword(s):
1996 ◽
Vol 35
(Part 1, No. 2B)
◽
pp. 1086-1089
◽
1996 ◽
Vol 35
(Part 1, No. 9B)
◽
pp. 4976-4979
◽